Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Removal Rating

3 µm

Anti Static

No

Product Use

Lube and Hydraulic Oil Filtration

Ultipor Glass Fiber 3µm Nitrile Seal 36in 91.44cm length

Product ID: HC0101FKZ36H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 39 Inches

Product ID: EB1401K01039Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
Filter Removal Rating (μm)
3 µm
See All Attributes

Ultipor III Glass Fiber 3 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC9020FRZ8ZY923)

Product ID: HC9020FKZ8ZY923
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 3 micron (Beta 1000) Nitrile 34in 86.36cm (REPLACED BY HC2618FRZ34Z)

Product ID: HC2618FCZ34H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 3 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC9600FRZ8ZY923)

Product ID: HC9600FKZ8ZY923
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 3 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC8900FKZ8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 3 micron (Beta 1000) Nitrile 4in 10.16cm

Product ID: HC2618FCZ34HX321
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

HC0101FCZ18Z ELEMENT

Product ID: HC0101FCZ18Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
2.5 Micron, Beta 1000
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 3 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC0101FRZ18Z)

Product ID: HC0101FCZ18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
2.5 Micron, Beta 1000
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 3 micron (Beta 1000) Fluorocarbon 41in 104.14cm (REPLACED BY HCY09003FRZ41Z)

Product ID: HCY09003FKZ41Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HCY090
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

This product is currently not available. Please contact us for more information.

10 Items
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Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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