Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Seal Material

Nitrile

Anti Static

No

Filter Media

Glass Fiber

Ultipor Glass Fiber 5µm Nitrile Seal 10in 25.4cm length

Product ID: HC2257FDP10H
Unit of Measure
2/EA
Min Order Qty
2
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2257
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 36 inches

Product ID: SKR9499
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
36 in
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 10 inches

Product ID: HA522602
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HA522
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 4 inches

Product ID: HA522601
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HA522
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Ultipor Glass Fiber 7µm Nitrile Seal 8in 20.32cm length

Product ID: HC2253FKN8H
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2253
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Red1000 Glass Fiber 25 micron (Beta 1000) Nitrile 10in 25.4cm length

Product ID: HC2238FKT10H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2238
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Ultipor Glass Fiber 7µm Nitrile Seal 18in 45.72cm length

Product ID: HC0101FKN18HY533
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating
7 micron, Beta 1000
See All Attributes

Ultipor Glass Fiber 25µm Nitrile Seal 8in 20.32cm length

Product ID: HC2253FKT8H
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2253
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2246FRS6H50)

Product ID: HC2246FKS6H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2246
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 18in 45.72cm (REPLACED BY HC2296FRS18H82)

Product ID: HC2296FCS18H82
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 19in 48.26cm

Product ID: HC2252FKS19H
Unit of Measure
2/EA
Min Order Qty
2
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2252
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC2252FRP10HN1)

Product ID: HC2252FCP10HN1
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2252
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
141 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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