Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Nominal Length (Imperial)

39 in

Seal Material

Nitrile

Anti Static

No

HCY-8300EOJ39HYK

Product ID: HCY8300EOJ39HYK
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
39 in
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This product is currently not available. Please contact us for more information.

HCY-8300EOM39HYK

Product ID: HCY8300EOM39HYK
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
39 in
See All Attributes

HCY-8300EOR39HYK

Product ID: HCY8300EOR39HYK
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
65 µm
Nominal Length (Imperial)
39 in
See All Attributes

Ultipor III Wire Mesh 100 micron Nitrile 39in 99.06cm length

Product ID: HC8300EOS39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8300
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
39 in
See All Attributes

Ultipor III Wire Mesh 25 micron Nitrile 39in 99.06cm length

Product ID: HC8904EOJ39HX378
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8904
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
39 in
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Coralon Glass Fiber 5 micron (Beta 1000) Nitrile 39in 99.06cm length (REPLACED BY HC0363FRP39Z)

Product ID: HC0363FCP39H
Unit of Measure
1/EA
Min Order Qty
8
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0363
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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This product is currently not available. Please contact us for more information.

Ultipor® III Filter Element

Product ID: HC8300FKP39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 39in 99.06cm (REPLACED BY HC8300FRS39HY755)

Product ID: HC8300FKS39HY755
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 39in 99.06cm length (REPLACED BY HC0364FRS39Z)

Product ID: HC0364FUS39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0364
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Coralon Glass Fiber 25 micron (Beta 1000) Nitrile 39in 99.06cm length (REPLACED BY HC0728FRT39H)

Product ID: HC0728FCT39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0728
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

This product is currently not available. Please contact us for more information.

10 Items
  • 1

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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