Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Seal Material

Nitrile

Beta Rating

BETA 2000

Nominal Length (Metric)

10.16 cm

Filter Media

Glass Fiber

FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 4 Inches

Product ID: H11100301A
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
25 µm
Membrane Material
Glass Fiber

UE210AS04H ELEMENT

Product ID: UE210AS04H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 4 Inches

Product ID: HC2226FRP4H50
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2226
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 4 Inches

Product ID: HC7500SRT4HYUR
Unit of Measure
6/EA
Min Order Qty
6
Beta Rating
BETA 2000
Element Series
HC7500
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
Filter Removal Rating (μm)
25 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 4 inches

Product ID: HC9601FHT4HSGM
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9601
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 4 Inches

Product ID: HC7500SRT4HYE
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC7500
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
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This product is currently not available. Please contact us for more information.

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 4 Inches

Product ID: HC7500SRP4HX334
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC7500
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Athalon Glass Fiber 5 micron (Beta 2000) Nitrile 4in 10.16cm

Product ID: UE299AP04H
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE299
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Ultipleat® SRT Filter Cartridge

Product ID: UE299AN04H
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE299
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 Inches

Product ID: HC7400SRN4HYR61
Unit of Measure
1/EA
Min Order Qty
1
Beta Rating
BETA 2000
Element Series
HC7400
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
Filter Removal Rating (μm)
7 µm
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This product is currently not available. Please contact us for more information.

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 4 inches

Product ID: HC9020FRZ4HY923
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9020
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 4 Inches

Product ID: HC2226FRS4H50YT
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2226
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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