Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Family

Red1000

Seal Material

Nitrile

HC2286EOJ15H50

Product ID: HC2286EOJ15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
22 micron
Filter Removal Rating (μm)
22 µm
See All Attributes

Red1000 Glass Fiber 25 micron (Beta 1000) Nitrile 10in 25.4cm length

Product ID: HC2238FKT10H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2238
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2246FRS6H50)

Product ID: HC2246FKS6H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2246
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 18in 45.72cm (REPLACED BY HC2296FRS18H82)

Product ID: HC2296FCS18H82
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 19in 48.26cm

Product ID: HC2252FKS19H
Unit of Measure
2/EA
Min Order Qty
2
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2252
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Red1000 Wire Mesh 22 micron Nitrile 4in 10.16cm

Product ID: HCY9020EOJ4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY902
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
4 in
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Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC2252FRP10HN1)

Product ID: HC2252FCP10HN1
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2252
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 30in 76.2cm length (REPLACED BY HCY152750FRN30H58)

Product ID: HCY152750FKN30H58
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HCY152
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Element Coralon HC2253FCP16H

Product ID: HC2253FCP16H
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2253
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 Micron, Beta 1000
See All Attributes

HCY-8300EOJ39HYK

Product ID: HCY8300EOJ39HYK
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
39 in
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC2252FRP10HN1)

Product ID: HC2252FKP10HN1
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2252
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Wire Mesh 50 micron Nitrile 15in 38.1cm

Product ID: HC2286EOM15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
50 micron
Filter Removal Rating (μm)
50 µm
See All Attributes
89 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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