Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Family

Supralon

Seal Material

Nitrile

Nominal Length (Metric)

33.02 cm

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13HYQ37
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9604
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 13 Inches

Product ID: HC8914FRP13HYP95
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8914
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 13 inches

Product ID: HC9100FRS13H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9100
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 13 inches

Product ID: HC9404FRS13HYT18
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9404
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 13 inches

Product ID: CT3009E/1
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HCA0009
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9601FHN13HX421
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9601
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 13 Inches

Product ID: HC8314FRN13HYP95
Unit of Measure
6/EA
Min Order Qty
6
Beta Rating
BETA 2000
Element Series
HC8314
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
Filter Removal Rating (μm)
7 µm
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 13 inches

Product ID: HC9404FRS13HY620
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9404
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 13 inches

Product ID: HC9404FRP13HYP95
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9404
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 13 Inches

Product ID: HC8200FRS13HY349
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8200
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 13 Inches

Product ID: HC6300FRN13HYE
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC6300
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 13 Inches

Product ID: HC8914FRP13HY643
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8914
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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