Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Seal Material

Nitrile

Nominal OD (Imperial)

3.8 in

Ultipor III Wire Mesh 25 micron Nitrile 16in 40.64cm length

Product ID: HC8900EOJ16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
16 in
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Ultipor Glass Fiber 25µm Nitrile Seal 26in 66.04cm length

Product ID: HC6500FDT26HYQ62
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6500
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

HCY-8900EOM26H

Product ID: HCY8900EOM26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY890
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
26 in
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Ultipor III Wire Mesh 50 micron Nitrile 26in 66.04cm

Product ID: HC8900EOM26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
26 in
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 16 Inches

Product ID: 20322141C
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 2000
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
Filter Removal Rating (μm)
25 µm
See All Attributes

Ultipor III Wire Mesh 100 micron Nitrile 26in 66.04cm length

Product ID: HC8900EOS26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
26 in
See All Attributes

Ultipor III Wire Mesh 25 micron Nitrile 39in 99.06cm length

Product ID: HC8904EOJ39HX378
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8904
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
39 in
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Ultipor SRT Anti-Static Glass Fiber 7 micron (Beta 1000) Nitrile 16in 40.64cm length (REPLACED BY HC8904FRN16Z)

Product ID: HC8904FMN16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8904
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC8900FRS8Z)

Product ID: HC8900FKS8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 13in 33.02cm (REPLACED BY HC9400FRN13HYE)

Product ID: HC9400FKN13HYE
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Nitrile 16in 40.64cm length

Product ID: HC8904FMP16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8904
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor SRT Anti-Static Glass Fiber 7 micron (Beta 1000) Nitrile 39in 99.06cm length

Product ID: HC9404FMN39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9404
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
25 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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