Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Removal Rating

3 µm

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 4 inches

Product ID: HC9020FRZ4ZY923
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9020
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 4 inches

Product ID: HC9600FRZ4Z
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9600
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 16 Inches

Product ID: HC8900FRZ16Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8900
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 9 inches

Product ID: HC9700FRZ9Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9700
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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ELEMENT UE610AZ20H

Product ID: UE610AZ20H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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ELEMENT UE610AZ40Z

Product ID: UE610AZ40Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 26 inches

Product ID: HC9400FRZ26Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9400
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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ELEMENT UE610AZ20Z

Product ID: UE610AZ20Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 4 inches

Product ID: HC9100FRZ4Z
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9100
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 36 Inches

Product ID: HC2296FRZ36H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2296
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 18 Inches

Product ID: HC2296FRZ18H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2296
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
See All Attributes

Athalon Glass Fiber 3 micron (Beta 2000) Ethylene Propylene 8in 20.32cm

Product ID: UE210AZ08J
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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