Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Media

Wire Mesh

Ultipor III Wire Mesh 50 micron Nitrile 26in 66.04cm

Product ID: HC8900EOM26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
26 in
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Ultipor® I Cleanable Filter Element

Product ID: HC9600EOA4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
225 µm
Nominal Length (Imperial)
4 in
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Ultipor III Wire Mesh 225 micron Fluorocarbon 13in 33.02cm

Product ID: HC9600EOT13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
225 µm
Nominal Length (Imperial)
13 in
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This product is currently not available. Please contact us for more information.

Ultipleat SRT Wire Mesh 40 micron Fluorocarbon 20in 50.8cm

Product ID: UE319KR20Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Element Series
UE319
Family
Ultipleat SRT
Filter Media
Wire Mesh
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
20 in
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Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Wire Mesh 50 micron Nitrile 30in 76.2cm

Product ID: HC2286EOM30H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
50 micron
Filter Removal Rating (μm)
50 µm
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Red1000 Wire Mesh 100 micron Nitrile 15in 38.1cm

Product ID: HC2286EOS15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
100 micron
Filter Removal Rating (μm)
100 µm
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Ultipor® I Cleanable Filter Element

Product ID: HC9600EOS13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
13 in
See All Attributes

HCY-8900EOM26H

Product ID: HCY8900EOM26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY890
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
26 in
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HC2296EOM36H50

Product ID: HC2296EOM36H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2296
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
50 micron
Filter Removal Rating (μm)
50 µm
See All Attributes

Ultipor III Wire Mesh Nitrile 16in 40.64cm

Product ID: HC8300FER16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8300
Family
Ultipor III
Filter Media
Wire Mesh
Nominal Length (Imperial)
16 in
Nominal Length (Metric)
40.64 cm
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HCY-8300EOJ16H

Product ID: HCY8300EOJ16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
16 in
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Ultipor III Wire Mesh 50 micron Nitrile 13in 33.02cm

Product ID: HC9600EOM13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
13 in
See All Attributes
53 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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