Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Filter Removal Rating

3 µm

Product Use

Lube and Hydraulic Oil Filtration

FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 4 Inches

Product ID: HC7400SRZ4Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 39 Inches

Product ID: HC8300FRZ39Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 39 Inches

Product ID: HC8304FRZ39Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 13 inches

Product ID: HC9600FRZ13Z
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 4 inches

Product ID: HC9020FRZ4Z
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 39 Inches

Product ID: HC8314FRZ39Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 8 inches

Product ID: HC9600FRZ8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 8 inches

Product ID: HC9020FRZ8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 8 Inches

Product ID: HC7500SRZ8Z
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 16 Inches

Product ID: HC8300FRZ16Z
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 8 inches

Product ID: HC9100FRZ8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 16 Inches

Product ID: HC8314FRZ16Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Glass Fiber

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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