Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Element Series

HC9600

Nominal Length (Metric)

10.16 cm

FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 inches

Product ID: HC9600FRN4Z
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 4 inches

Product ID: HC9600FRT4Z
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
25 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 4 inches

Product ID: HC9600FRP4Z
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 4 inches

Product ID: HC9600FRS4Z
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
12 µm
Membrane Material
Glass Fiber

Ultipor SRT Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm

Product ID: HC9600FAN4H
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Ultipor® I Cleanable Filter Element

Product ID: HC9600EOA4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
225 µm
Nominal Length (Imperial)
4 in
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 4 inches

Product ID: HC9600FRP4J
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9600
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 inches

Product ID: HC9600FRN4J
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9600
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 4 inches

Product ID: HC9600FRT4J
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9600
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 4 inches

Product ID: HC9600FRP4ZX334
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9600
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Ultipor® I Cleanable Filter Element

Product ID: HC9600EOS4H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
4 in
See All Attributes

High Temp Ultipor® II Filter Element

Product ID: HC9600FTN4Z
Unit of Measure
4/EA
Min Order Qty
4
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes
17 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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