Why choose Profile Nano depth filter cartridges for CMP applications?
These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.
Additional benefits include:
- High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
- Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
- Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles