Gasket-Sert™ PMF Filter product photo Primary L

Gasket-Sert™ PMF Filter

The Gasket-SertTM PMF filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.

  • True in-line design and easy installation
  • Fits in place of standard 1/4” and 3/8”,1/2” VCR1 ,UJR2 gasket & 1/4” and 3/8” UPG3 gasket
  • Broad compatibility with process gases
  • Low differential pressure
  • Gasket material 316L stainless steel
  • Dried with high purity nitrogen
  • Cleanroom packaged
  • No hold-up volume
  • No particle contribution above background
  • No housing required
  • Retrofit of existing panels without reconfiguring of systems
  • Zero displacement
  • Protection for regulators and MFCs
1 VCR is a trademark of Swagelok Co.
2 UJR is a trademark of Fujikin Incorporated.
3 UPG is a trademark of Fujikin Incorporated.

UJR, VCR fitting type


UPG fitting type


Installation example : 1/4” VCR fitting



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Datasheets

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Description

The Gasket-SertTM PMF filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.

  • True in-line design and easy installation
  • Fits in place of standard 1/4” and 3/8”,1/2” VCR1 ,UJR2 gasket & 1/4” and 3/8” UPG3 gasket
  • Broad compatibility with process gases
  • Low differential pressure
  • Gasket material 316L stainless steel
  • Dried with high purity nitrogen
  • Cleanroom packaged
  • No hold-up volume
  • No particle contribution above background
  • No housing required
  • Retrofit of existing panels without reconfiguring of systems
  • Zero displacement
  • Protection for regulators and MFCs
1 VCR is a trademark of Swagelok Co.
2 UJR is a trademark of Fujikin Incorporated.
3 UPG is a trademark of Fujikin Incorporated.

UJR, VCR fitting type


UPG fitting type


Installation example : 1/4” VCR fitting

Specifications

Materials

  • Medium: 316L stainless steel
  • Gasket: 316L stainless steel

Removal Rating

  • ≥ 0.4 μm

Maximum Operating Temperature Non-Corrosive Gases

  • 840 °F / 450 °C

Maximum Differential Pressure

  • 60 psid @ 100 °F / 4.2 bar @ 38 °C

Performance

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate

Type

Filter Cartridges

Use

Filtration | Gas

Ordering Information

CNF1004 [TABLE 1]

Code Fitting type Gasket material Medium material Length (L) (mm) Length (A) (mm)
USG4 1⁄4" UJR, VCR 316L stainless steel 316L stainless steel 26.1 ∅4.2
USG6 3⁄8" 1⁄2" UJR, VCR 316L stainless steel 316L stainless steel 30.0 ∅6.7
UPSG4 1⁄4" UPG 316L stainless steel 316L stainless steel 26.6 ∅4.2
UPSG6 3⁄8" UPG 316L stainless steel 316L stainless steel 30.0 ∅6.7

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