The Ultramet-L® 4000 Series Filter Assembly is a unique, all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
- All 316L stainless steel construction
- State-of-the-art 316L stainless steel media
- Excellent particle removal efficiency vs. pressure drop
- Accommodates extremely high flow rates for the assembly size
- Excellent gas displacement and desorption characteristics
- High temperature and pressure capabilities
- Compact size for ease of installation
- Wide variety of fitting options available
- 100% helium leak tested
- Cleanroom manufactured and packaged
- VAR PLUS housing material meets or exceeds VIM VAR specifications
| Filter Medium | 316L stainless steel |
| Internal Surface Finish | ≤ 7 μin / 0.18 μm Ra |
| Housing | Electropolished 316L stainless steel Housing material meets or exceeds VIM / VAR specifications |
| Removal Rating | ≥ 3 nm |
| Particle Removal Characteristics | 109 particle reduction up to 6 slpm / 0.2 scfm |
| 104 particle reduction up to 75 slpm / 2.6 scfm | |
| Connections | 1⁄4", 1⁄2" Gasket Seal, Male / Male (VCR1 or compatible) |
| 1⁄4" Compression Seal, Male / Male (Swagelok1 or compatible) | |
| 1⁄4" Butt Weld (0.035" / 0.89 mm wall) | |
| Leak Rating | 100% helium leak tested to 10-9 atm•cc/s |
| Design validated to 10-11 atm•cm3/s | |
| Maximum Operating Pressure | 3000 psig @ 100 °F / 207 bar @ 38 °C 1685 psig @ 840 °F / 1 16 bar @ 450 °C |
| Maximum Allowable Differential Pressure | 125 psid @ 100 °F / 8.6 bar @ 38 °C 60 psid @ 840 °F / 4.1 bar @ 450 °C |
| EU pressure equipment directive | Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU |
1 VCR and Swagelok are trademarks of Swagelok Co.
Pressure Drop vs. Gas Flow Rate
Assemblies
Filtration
Dimensions
| Part Number | Description | |
| GLFF4000VM4 | 1⁄4 in. Gasket Seal (VCR or Compatible) Male/Male | 3.31 / 84 (L1) |
| GLFF4000SM4 | 1⁄4 in. Compression Seal (Swagelok or Compatible) Male/Male | 2.88 / 73 (L1) |
| GLFF4000BW4 | 1⁄4 in. Butt Weld, 0.035 in. / 0.89 mm wall | 1.75 / 45 (L2) |
| GLFF4000VMM8 | 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male | 3.35 / 85 (L1) |
Unit conversion: 1 bar = 100 kilopascals
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