Beschreibung
Emflon® filter elements are designed for ≥ 3 nanometer (0.003 μm) filtration of inert gas applications used in the production of semiconductor devices.
- Wide variety of applications
- High particle removal efficiency
- Flow rates up to 50 scfm
- High flow rates vs. differential pressure
- Optimized cartridge design
- Manufactured in a cleanroom environment
- 100% integrity tested
Spezifikationenn
Materials
- Medium: PTFE
- Core, cage, and end caps: Polypropylene
- Support and drainage: Polypropylene
- O-rings: Viton1, Viton-A
Removal Rating
- ≥ 0.003 μm
Configurations
- Nominal length:
- 1 in./25 mm
- 1.75 in./44 mm
- 2.5 in./64 mm
- 5 in./127 mm
- Diameter: 2.18 in./55 mm
- O-ring size/end caps:
- 115 internal/flat end (9106/9112)
- 116 internal/flat end (2230/4463)
- 118 external/flat end (4440)
- 209 internal/flat end (9130/9163)
Operating Conditions
- Maximum Temperature: 194 °F/90 °C
- Maximum Forward Differential Pressure:
- 80 psid @ 120 °F/5.5 bar @ 50 °C
- 50 psid @ 194 °F/3.5 bar @ 90 °C
1 Viton is a trademark of DuPont Dow Elastomers
Leistung
Pressure Drop vs. Gas Flow Rate
Cartridge Style Junior 9106/9112
Cartridge Style Junior 4440
Cartridge Style Junior 2230/9130
Cartridge Style Junior 4463/9163
Typ
Filter Cartridges
Bestellinformation
| Part Number | Removal Rating (μm) | Nominal Length (in. / mm) | O-Ring Size/Material |
| MCY9106FREH | 0.003 | 1 / 25 | 115 / Viton (Internal) |
| MCY9112FREH | 0.003 | 1.75 / 44 | 115 / Viton (Internal) |
| MCY9130FREH | 0.003 | 2.5 / 64 | 209 / Viton (Internal) |
| MCY9163FREH | 0.003 | 5 / 127 | 209 / Viton (Internal) |
| MDY2230FREHF | 0.003 | 2.5 / 64 | 116 / Viton A (Internal) |
| MCY4463FREHF | 0.003 | 5 / 127 | 116 / Viton A (Internal) |
| MCY4440FREHF | 0.003 | 5 / 127 | 118 / Viton A (External) |
Unit conversion: 1 bar = 100 kilopascals
Rezensionen
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