Beschreibung
The Gaskleen® IV Series Filter Assembly is specifically designed for ≤ 3 nanometers (0.003 µm) filtration of ultra-high purity semiconductor process gases. This assembly provides additional features over those normally associated with all fluoro-polymer element point-ofuse process gas filters. These include:
Products in this datasheet may be covered by one or more patents, including US 5,510,026.
- No downstream (wetted surface) weld
- No elastomeric seals
- Rotatable VCR1 nuts for ease of installation
- Excellent gas displacement characteristics (low internal volume)
Additional characteristics
- High purity 316L stainless steel electropolished housing
- All fluoro-polymer element
- High temperature and pressure capabilities
- Compact size (1.13 in./ 28.8 mm dia.) for ease of installation
- 100% integrity tested
- Cleanroom manufactured and packaged
1 VCR is a trademark of Swagelok Co.
Products in this datasheet may be covered by one or more patents, including US 5,510,026.
Spezifikationenn
| Filter Medium | PTFE |
| Support | TFE / FEP |
| Core and end caps | PFA 440HP |
| O-ring | none |
| internal surface finish | ≤ 7 μin / 0.18 μm Ra |
| Housing | Electropolished 316L stainless steel VAR PLUS housing meets or exceeds typical VIM / VAR specifications |
| Removal Rating2 | ≥ 3 nm |
| Preconditioned Cleanliness | < 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD) |
| < 10 ppb THC contribution (Qualified per SEMASPEC test method #90120396B-STD) | |
| < 10 ppb O2 contribution (Qualified per SEMASPEC test method #90120398B-STD) | |
| < 1 particle/(ft3) contribution above background | |
| Connections | 1⁄4" Gasket seal, male (VCR or compatible) |
| 1⁄4" Butt Weld (0.035" / 0.89 mm wall) | |
| 3⁄8" Gasket Seal, male (VCR or compatible) | |
| 3⁄8" Butt Weld (0.035" / 0.89 mm wall) | |
| 1⁄2" Butt Weld (0.049" / 1.24 mm wall) | |
| Leak Rating | 100% helium leak tested to 10-9 atm•cm3/s |
| Design validated to 10-11 atm•cm3/s | |
| Maximum Operating Pressure | 750 psig @ 284 °F / 52 bar @ 140 °C |
| Maximum Forward Differential Pressure | 100 psid @ 100 °F / 7 bar @ 38 °C |
| Maximum Reverse Differential Pressure | 50 psid @ 100 °F / 3.5 bar @ 38 °C |
| Packaging | Double bagged |
| Outer bag: aluminized mylar3 | |
| Inner bag: polyethylene | |
| N2 purged | |
1 VCR is a trademark of Swagelok Co.
2 Particle rating based on laboratory testing with NaCl aerosol.
3 Mylar is a registered trademark of Dupont Teijin Films.
Leistung
Pressure Drop vs. Gas Flow Rate1
1 For .25 in. connections
Typ
Filter Capsules
zusätzliche Informationen
Dimensions
VCR Connection
Butt Weld Connection
Bestellinformation
| Part Number | Description | |
| SGLFPF6402VMM4 | 1⁄4 in. Gasket Seal, (VCR or Compatible) Male Inlet/Male Outlet | 5.00 /127 |
| GLFPF6402BW4 | 1⁄4 in. Butt Weld, 0.035 in. / 0.89 mm wall | 3.87 / 98 |
| SGLFPF6402VMM6/8 | 3⁄8 in. Gasket Seal, (VCR or Compatible) Male Inlet/Male Outlet | 5.00 /127 |
| GLFPF6402BW6 | 3⁄8 in. Butt Weld, 0.035 in. / 0.89 mm wall | 3.87 / 98 |
| GLFPF6402BW8 | 1⁄2 in. Butt Weld, 0.049 in. / 1.24 mm wall | 3.87 / 98 |
Unit conversion: 1 bar = 100 kilopascals
Rezensionen
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