PhotoKleen™ EZD-3 Filter Assembly product photo Primary L

PhotoKleen™ EZD-3 Filter Assembly

The PhotoKleen™ EZD-3 filter is designed for extremely small resist pump installations. It is specifically designed for small-volume dispense systems, which have the smallest footprint. The PhotoKleen EZD-3 filter unit consists of a quick-disconnect head manifold and a High Density Polyethylene (HDPE) capsule. This configuration allows for safe, quick, and easy filter change outs. Three filter media – PTFE, HDPE and nylon 6,6 – are available. The naturally hydrophilic nylon 6,6 membrane allows for spontaneous wettability. This minimizes photochemical waste by providing quick start up and minimized bubble generation.
  • Capsule-style filter assembly
  • Top in / top out flow direction, with inlet flow stream down to the bottom
  • Minimized hold-up volume (40 mL)
  • Quick filter replacement (one step)
  • Optimized for 60 mm-width resist pump for reduced dispense system
  • Minimized dead space
  • Reduces chemical waste during filter startup and change out


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설명

The PhotoKleen™ EZD-3 filter is designed for extremely small resist pump installations. It is specifically designed for small-volume dispense systems, which have the smallest footprint. The PhotoKleen EZD-3 filter unit consists of a quick-disconnect head manifold and a High Density Polyethylene (HDPE) capsule. This configuration allows for safe, quick, and easy filter change outs. Three filter media – PTFE, HDPE and nylon 6,6 – are available. The naturally hydrophilic nylon 6,6 membrane allows for spontaneous wettability. This minimizes photochemical waste by providing quick start up and minimized bubble generation.
  • Capsule-style filter assembly
  • Top in / top out flow direction, with inlet flow stream down to the bottom
  • Minimized hold-up volume (40 mL)
  • Quick filter replacement (one step)
  • Optimized for 60 mm-width resist pump for reduced dispense system
  • Minimized dead space
  • Reduces chemical waste during filter startup and change out

규격사양

Specifications (Filter Capsules)

Materials of Construction

Components Materials
Filter Media P-Nylon PE-Kleen P Emflon
Hydrophilic Nylon6,6 High Density Polyethylene (HDPE) PTFE
Support and Drainage High Density Polyethylene (HDPE)
Core, Cage, and End Caps High Density Polyethylene (HDPE)
Housing High Density Polyethylene (HDPE)
O-ring Kalrez1

1Kalrez is a registered trademark of E. I. du Pont de Nemours and Company

Removal Ratings (μm) P-Nylon PE-Kleen P Emflon
20 nm 40 nm, 0.1, 0.2 10 nm 30 nm, 0.05 0.05, 0.1, 0.2
Nominal Filter Areas 710 cm2 / 0.76 ft2 660 cm2 / 0.71 ft2 770 cm2 / 0.82 ft2 660 cm2 / 0.71 ft2 660 cm2 / 0.71 ft2
Maximum Forward Differential Pressure 0.27 MPa @ 20 °C / 39 psid @ 68 °F 0.29 MPa @ 30 °C / 42 psid @ 86 °F 0.29 MPa @ 30 °C / 42 psid @ 86 °F
Maximum Operating Temperature 30 °C / 86 °F
Maximum Operating Pressure 0.29 MPaG @ 30 °C / 42 psig @ 86 °F

Specifications (Head Manifold)

Materials of Construction

Components Materials
Head PFA / HDPE
Fitting PFA / PCTFE
Stage and lever SUS304

Connections

Type Inlet / Outlet Vent
Super Pillar3 type 1/4" (6.35 x 3.9 mm) Elbow union 1/4" (6.35 x 3.9 mm) Elbow union
1/4" (6.35 x 3.9 mm) Straight union 1/4" (6.35 x 3.9 mm) Straight union
Flowell4 60 series 1/4" (6.35 x 3.9 mm) Fitting 1/4" (6.35 x 3.9 mm) Fitting
4 x 3 mm / 4 x 2 mm Fitting 4 x 3 mm / 4 x 2 mm Fitting
5 x 3 mm Fitting 5 x 3 mm Fitting

3Pillar is a trademark of Nippon Plillar Packing Co.,Ltd.
4Flowell is a trademark of Flowell Co.,Ltd.

성능

Typical Flow Characteristics - 1cP fluid, 20℃

P Emflon Filter (PTFE media)


 PE-Kleen Filter (HDPE media)

P-Nylon Filter (Nylon 6,6 media)
 

종류

Filter Capsules

추가 정보

Filter Media Electron Micrograph

P-Nylon (Nylon 6,6)

PE-Kleen (HDPE)

P Emflon (PTFE)

Dimensions Dimensions Dimensions

Dimensions

Dimensions
Dimensions
Dimensions Dimensions
Dimensions

주문정보

Part Numbers / Ordering Information (Filter Capsules)

PHD11 [1] EH11B

Table 1

 
Code Filter Media Removal ratings
ANM P-Nylon
(Asymmetric Nylon 6,6)
20 nm
AND 40 nm
UNI P-Nylon
(Nylon 6,6)
0.1 μm
UNA 0.2 μm
UG001 PE-Kleen
(HDPE)
10 nm
UG003 30 nm
UG005 50 nm
UFD P Emflon
(PTFE)
50 nm
UFT 0.1 μm
UFR 0.2 μm
 

Spare Parts

 
Produt Name Part Number Memo
Dummy Capsule PHDC11H11B O-ring : Kalrez
PHDC12H11B-XP+ O-ring : Kalrez
Special Clean Product
 

Part Numbers / Ordering Information (Head Manifold)

PHF11G [1]

Table 1

 
Code Inlet / Outlet Vent
PS44LD 1/4" (6.35 x 3.9 mm) Super Pillar Elbow union 1/4" (6.35 x 3.9 mm) Super Pillar Elbow union
PS44LTD 1/4" (6.35 x 3.9 mm) Super Pillar Straight union 1/4" (6.35 x 3.9 mm) Super Pillar Straight union
FS44WLTD 1/4" (6.35 x 4.3 mm) Flowell 60 Fitting 1/4" (6.35 x 4.3 mm) Flowell 60 Fitting
FS44MLD 4 x 3 mm / 4 x 2 mm Flowell 60 Fitting 4 x 3 mm / 4 x 2 mm Flowell 60 Fitting
FS55MLTD 5 x 3 mm Flowell 60 Fitting 5 x 3 mm Flowell 60 Fitting
 

Representative example part numbers

(Head Manifold)

 

(Capsules)

PHF11GFS44WLTD

 

PHD11UNAEH11B

PHF11GFS44MLD

 

PHD11UNIEH11B

PHF11GPS44LD

PHF11GPS44LTD

 

PHD11ANMEH11B

PHF11GFS55MLTD

 

PHD11ANDEH11B

 

PHD11UG005EH11B

 

PHD11UG003EH11B

 

PHD11UG001EH11B

 

PHD11UFREH11B

 

PHD11UFTEH11B

 

PHD11UFDEH11B

적용분야

Photolithography, Photolithography

영역

Display, Semiconductor

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