설명
The UltiKleen Excellar ER filters show enhanced retention (ER) and improved non-dewetting properties over previous designs. These properties enable semiconductor makers to meet the chemical process filtration requirements of the 22 nanometer manufacturing node and beyond. The smaller format assemblies are designed for critical single-pass, point-of-use retention. The filter's high flow rate also makes it suitable for recirculation bath applications.
KC disposable assemblies are available with ten inch nominal, (254 mm) filters for higher flow rates.1 The shorter UltiKleen Excellar ER KC assemblies shown here are ideally suited for lower flow point-of-use and single wafer tool applications.
KC disposable assemblies are available with ten inch nominal, (254 mm) filters for higher flow rates.1 The shorter UltiKleen Excellar ER KC assemblies shown here are ideally suited for lower flow point-of-use and single wafer tool applications.
Features
- Provided fully prewet as standard
- Me-KleenSM option for ultra low metal ion extractables
- 100% Integrity tested
- Proprietary non-dewetting surface
- Choice of connection sizes
Benefits
- No need to prewet and flush for safe quick start
- Reduced qualification time in critical clean processes
- Assured filter integrity
- Filter resists drying in outgassing chemistries or after chemical changes
- Sizes to fit existing connections
규격사양
Materials of Construction
| Filter Medium | PTFE |
| Capsule, core, cage, and end caps Filter support and drainage Sealing method | High purity PFA PTFE Proprietary melt seal process |
| Removal Rating | 20 nm, 15 nm |
| Filter Area | 0.9 m2 / 9.7 ft2 |
| Maximum Operating Temperature | 170 °C / 338 °F |
| Maximun forward / reverse differential pressure (gauge)2 | 0.5 MPa (71 psi) @ 25 °C (77 °F) 0.4 MPa (57 psi) @ 60 °C (140 °F) 0.35 MPa (49 psi) @ 90 °C (194 °F) 0.2 MPa (29 psi) @ 120 °C (248 °F) 0.15 MPa (22 psi) @ 150 °C (302 °F) 0.12 MPa (17 psi) @ 170 °C (338 °F) |
1See bulletins MEUKG2EREN
2Reverse pressure is not recommended during normal operation
성능
Pressure Drop vs. Liquid Flow Rate (Water, 20 °C)3 Clean
3Typical flow rates.
For liquids other than water, multiply the differential pressure by fluid viscosity in centipoise.
Unit conversion: 1 bar = 0.1 MPa
종류
Filter Capsules
추가 정보
Dimensions
적용분야
Chemicals
영역
Semiconductor
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