P Emflon® Filter (Lithography) product photo Primary L

P Emflon® Filter (Lithography)

The P Emflon filter is specifically recommended for bulk filtration of photoresists and chemicals that are compatible with PTFE and high density polyethylene (HDPE). In addition, it utilizes the latest advance in Pall filtration technology: the crescent shaped Ultipleat® filter configuration.

  • Wide range of configurations
  • High flow rates
  • Integrity testable
  • Low extractables
  • Optimized design
  • Manufactured in a cleanroom environment
  • 100% integrity tested


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설명

The P Emflon filter is specifically recommended for bulk filtration of photoresists and chemicals that are compatible with PTFE and high density polyethylene (HDPE). In addition, it utilizes the latest advance in Pall filtration technology: the crescent shaped Ultipleat® filter configuration.

  • Wide range of configurations
  • High flow rates
  • Integrity testable
  • Low extractables
  • Optimized design
  • Manufactured in a cleanroom environment
  • 100% integrity tested

규격사양

Materials of Construction

 
Components Materials
Filter Medium PTFE
Support and Drainage High density polyethylene (HDPE)
Core and Cage High density polyethylene (HDPE)
End Caps High density polyethylene (HDPE)
O-ring Options FEP Encapsulated Fluoroelastomer, Silicone, Perfluoroelastomer, Acid-proof Fluoroelastomer, EPDM
 

Removal Rating and Operating Conditions

 
Removal Ratings 0.05 μm, 0.1 μm, 0.2 μm, 0.45 μm, 5 μm, 10 μm
Filter Configuration ABD1
Nominal Filter Areas 1.1 m2 / 12 ft2
Maximum Operation
Temperature
60 ˚C / 140 ˚F
Maximum Forward /
Reverse Differential Pressure
0.34 MPa @ 60 ˚C / 49.3 psid @ 140 ˚F
 

성능

Typical Flow Characteristics - 1cP fluid, 20℃


Pressure Drop vs. Liquid Flow Rate

종류

Filter Cartridges

주문정보

Part Numbers / Ordering Information


ABD [1] UF [2][3] [4]

Table 1

 
Code Nominal Cartridge Length (L)
1 254 mm / 10 in
2 508 mm / 20 in
3 762 mm / 30 in
 

Table 2

 
Code Removal Ratings
D 0.05 μm
T 0.1 μm
R 0.2 μm
X 0.45 μm
C 5 μm
E 10 μm
 

Table 3

 
Code O-ring Specifications
3 AS568A-222
7 AS568A-226
8 AS568A-222
 

Table 4

 
Code O-ring Materials
H1 FEP Encapsulated Fluoroelastomer
H4 Silicone
H11 Perfluoroelastomer
HF Acid-proof Fluoroelastomer
J EPDM
 

Representative example part numbers


ABD1UFE3EJ
ABD1UFC3EJ
ABD1UFR3EH1
ABD1UFT3EH1
ABD1UFT7EH1
ABD1UFT8EH1
ABD1UFD3EH1
ABD1UFD7EH1
ABD1UFD8EH1

적용분야

Photolithography

영역

Semiconductor

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