설명
The Mini Kleen-Change filter assembly is designed for small scale dispense applications where low hold-up volume and cleanliness are critical. The low hold-up volume is ensured by the very small footprint. Cleanliness and compatibility are ensured by the all fluoro-polymer construction.
20nm grade has newly added to this product line that allows to remove more finer particles for the leading-edge industries.
20nm grade has newly added to this product line that allows to remove more finer particles for the leading-edge industries.
- Low hold-up volume
- All fluoro-polymer construction
- No elastomeric seals
- Cleanroom manufactured
규격사양
Materials of Construction
| Components | Materials |
| Filter Media | PTFE |
| Support and Drainage | FEP / PTFE |
| Core, Cage, and End Caps | PFA |
| Housing | PFA |
| Removal Ratings | 20 nm, 0.05 µm, 0.1 µm |
| Filter Area | 320 cm2 / 50 in2 |
| Connections | Inlet / Outlet : ¼” Super Pillar Fitting * Vent / Drain : ¼” Super Pillar Fitting * |
| Maximum Operating Temperature | 248 °F / 120 °C |
| Maximum Operating Pressure | 58 psi @ 77 °F / 0.4 MPa @ 25 °C 29 psi @ 194 °F / 0.2 MPa @ 90 °C 22 psi @ 248 °F / 0.15 MPa @ 120 °C |
* Super Pillar is a trademark of Pillar Packing Co., Ltd.
성능
Pressure Drop vs. Liquid Flow Rate (Water, 20°C)1
1For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in mPa•s.
종류
Filter Capsules
추가 정보
Dimensions
주문정보
Part Numbers / Ordering Information
| Code | Removal ratings | Length L |
| FK | 20 nm | 4.25 / 108 |
| F0005 | 0.05 µm | |
| F001 | 0.1 µm | |
적용분야
Photolithography
영역
Semiconductor
Reviews
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