설명
The PhotoKleen™ EZD-3 filter is designed for extremely small resist pump installations. It is specifically designed for small-volume dispense systems, which have the smallest footprint. The PhotoKleen EZD-3 filter unit consists of a quick-disconnect head manifold and a High Density Polyethylene (HDPE) capsule. This configuration allows for safe, quick, and easy filter change outs. Three filter media – PTFE, HDPE and nylon 6,6 – are available. The naturally hydrophilic nylon 6,6 membrane allows for spontaneous wettability. This minimizes photochemical waste by providing quick start up and minimized bubble generation.
- Capsule-style filter assembly
- Top in / top out flow direction, with inlet flow stream down to the bottom
- Minimized hold-up volume (40 mL)
- Quick filter replacement (one step)
- Optimized for 60 mm-width resist pump for reduced dispense system
- Minimized dead space
- Reduces chemical waste during filter startup and change out
규격사양
Specifications (Filter Capsules)
Materials of Construction
| Components | Materials | ||
| Filter Media | P-Nylon | PE-Kleen | P Emflon |
| Hydrophilic Nylon6,6 | PTFE | ||
| Support and Drainage | |||
| Core, Cage, and End Caps | |||
| Housing | |||
| O-ring | Perfluoroelastomer | ||
| Removal Ratings (μm) | P-Nylon | PE-Kleen | P Emflon | ||
| 20 nm | 40 nm, 0.1, 0.2 | 10 nm | 30 nm, 0.05 | 0.05, 0.1, 0.2 | |
| Nominal Filter Areas | 710 cm2 / 0.76 ft2 | 660 cm2 / 0.71 ft2 | 770 cm2 / 0.82 ft2 | 660 cm2 / 0.71 ft2 | 660 cm2 / 0.71 ft2 |
| Maximum Forward Differential Pressure | 0.27 MPa @ 20 °C / 39 psid @ 68 °F | 0.29 MPa @ 30 °C / 42 psid @ 86 °F | 0.29 MPa @ 30 °C / 42 psid @ 86 °F | ||
| Maximum Operating Temperature | 30 °C / 86 °F | ||||
| Maximum Operating Pressure | 0.29 MPaG @ 30 °C / 42 psig @ 86 °F | ||||
Specifications (Head Manifold)
Materials of Construction
| Components | Materials |
| Head | PFA / HDPE |
| Fitting | PFA / PCTFE |
| Stage and lever | SUS304 |
Connections
| Type | Inlet / Outlet | Vent |
| Super Pillar3 type | 1/4" (6.35 x 3.9 mm) Elbow union | 1/4" (6.35 x 3.9 mm) Elbow union |
| 1/4" (6.35 x 3.9 mm) Straight union | 1/4" (6.35 x 3.9 mm) Straight union | |
| Flowell4 60 series | 1/4" (6.35 x 3.9 mm) Fitting | 1/4" (6.35 x 3.9 mm) Fitting |
| 4 x 3 mm / 4 x 2 mm Fitting | 4 x 3 mm / 4 x 2 mm Fitting | |
| 5 x 3 mm Fitting | 5 x 3 mm Fitting | |
3Pillar is a trademark of Nippon
4Flowell is a trademark of Flowell Co.
성능
Typical Flow Characteristics - 1cP fluid, 20℃
종류
Filter Capsules
추가 정보
Filter Media Electron Micrograph
P-Nylon (Nylon 6,6) |
PE-Kleen (HDPE) |
P Emflon (PTFE) |
 |
 |
 |
Dimensions
주문정보
Part Numbers / Ordering Information (Filter Capsules)
PHD11 [1] EH11B
Table 1
| Code | Filter Media | Removal ratings |
| ANM | P-Nylon (Asymmetric Nylon 6,6) |
20 nm |
| AND | 40 nm | |
| UNI | P-Nylon (Nylon 6,6) |
0.1 μm |
| UNA | 0.2 μm | |
| UG001 | PE-Kleen (HDPE) |
10 nm |
| UG003 | 30 nm | |
| UG005 | 50 nm | |
| UFD | P Emflon (PTFE) |
50 nm |
| UFT | 0.1 μm | |
| UFR | 0.2 μm | |
Spare Parts
| Part Number | Memo | |
| Dummy Capsule | PHDC11H11B | |
| PHDC12H11B-XP+ | Special Clean Product |
|
Caution: For optimal filtration performance, it is recommended to replace your filters at-least once a year. Annual replacements will reduce the potential of any leakages that may result due to prolonged chemical exposure. Pall warrants its filters for a period of 1 year from the date of shipment.
Part Numbers / Ordering Information (Head Manifold)
PHF11G [1]
Table 1
| Code | Inlet / Outlet | Vent |
| PS44LD | 1/4" (6.35 x 3.9 mm) Super Pillar Elbow union | 1/4" (6.35 x 3.9 mm) Super Pillar Elbow union |
| PS44LTD | 1/4" (6.35 x 3.9 mm) Super Pillar Straight union | 1/4" (6.35 x 3.9 mm) Super Pillar Straight union |
| FS44WLTD | 1/4" (6.35 x 4.3 mm) Flowell 60 Fitting | 1/4" (6.35 x 4.3 mm) Flowell 60 Fitting |
| FS44MLD | 4 x 3 mm / 4 x 2 mm Flowell 60 Fitting | 4 x 3 mm / 4 x 2 mm Flowell 60 Fitting |
| FS55MLTD | 5 x 3 mm Flowell 60 Fitting | 5 x 3 mm Flowell 60 Fitting |
Representative example part numbers
(Head Manifold) |
(Capsules) |
|
PHF11GFS44WLTD |
PHD11UNAEH11B |
|
PHF11GFS44MLD |
PHD11UNIEH11B |
|
PHF11GPS44LD |
||
PHF11GPS44LTD |
PHD11ANMEH11B |
|
PHF11GFS55MLTD |
PHD11ANDEH11B |
|
PHD11UG005EH11B |
||
PHD11UG003EH11B |
||
PHD11UG001EH11B |
||
PHD11UFREH11B |
||
PHD11UFTEH11B |
||
PHD11UFDEH11B |
적용분야
Photolithography, Photolithography
영역
Display, Semiconductor
Reviews
Earn 10% off* your next order online by leaving a review of this product. Please login to your account to leave a review. We appreciate and value your feedback.
*Subject to Terms and Conditions.
