Pall's Gaskleen Top Mount (TM) filter assemblies are designed for 1.5 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change.
- Electropolished 316L stainless steel housing
- State-of-the-art 316L stainless steel filter medium
- High temperature and pressure capabilities
- Excellent gas displacement and desorption characteristics
- 100% helium leak tested
- Manufactured and packaged in a cleanroom environment
- Available with a 1⁄4 in. VCR1 port on top of assembly for a pressure gauge or other component
- Improved corrosion resistance using Pall's proprietary process
1 VCR is a registered trademark of Swagelok Company
| Filter Medium | 316L stainless steel |
| Internal Surface Finish | ≤ 0.7 μm Rmax |
| Housing | Electropolished 316L stainless steel Housing material meets or exceeds VIM / VAR specifications |
| Removal Rating | 1.5 nm |
| Particle Removal Characteristics | 109 reduction at rated flow of 5 slpm |
| 106 reduction at rated flow of 15 slpm | |
| 104 reduction at rated flow of 30 slpm | |
| Connections | W-seal, 11⁄2˝ interface |
| Leak Rating | 100% helium leak tested to 10-9 atm•cm3/s |
| Design validated to 10-11 atm•cm3/s | |
| Maximum Operating Pressure | 0.97 MPa @ 40 °C / 140 psig @ 104 °F |
| Maximum Allowable Differential Pressure | 0.69 MPa @ 40 °C / 100 psid @ 104 °F |
| EU pressure equipment directive | Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU |
1 VCR is a registered trademark of Swagelok Company
Pressure Drop vs. Gas Flow Rate
F3200
Filter Capsules
Dimensions
GTM-3200F4A
GTMF3200F4A-VM4
| Part Number | Description1 | Height (H) (mm / in.) |
Design Flow Rate (slpm) |
| GTMF3200F4A | All 316L stainless steel | 42 / 1.65 | 0-30 |
| GTMF3200F4A-VM4 | All 316L stainless steel 1⁄4 in. VCR port |
60 / 2.36 | 0-30 |
1 Please contact Pall Microelectronics for other configurations.
Process gas filtration
Semiconductor
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