Membralox® Filter Assemblies product photo Primary L

Membralox® Filter Assemblies

The Membralox® ceramic filter assemblies are designed for ultra-high purity gas filtration applications, providing removal of particles ≥ 3 nanometer.
  • Inert alumina medium with a precise pore structure
  • 316L stainless steel housing
  • Excellent temperature and corrosion resistance
  • Superior dry down characteristics
  • Clean room manufactured and packaged
  • 100% helium leak tested

Products in this datasheet may be covered by one or more patents, including EP 442,410; US 5,143,614.


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설명

The Membralox® ceramic filter assemblies are designed for ultra-high purity gas filtration applications, providing removal of particles ≥ 3 nanometer.
  • Inert alumina medium with a precise pore structure
  • 316L stainless steel housing
  • Excellent temperature and corrosion resistance
  • Superior dry down characteristics
  • Clean room manufactured and packaged
  • 100% helium leak tested

Products in this datasheet may be covered by one or more patents, including EP 442,410; US 5,143,614.

규격사양

Materials of Construction

Filter Medium High purity, inert alumina oxide
Internal Surface Finish ≤ 0.38 μm / 15 μin Ra
Housing Electropolished 316L stainless steel
Housing material meets or exceeds VIM/VAR specifications.
EU pressure equipment directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.
Internal housing surface chemistry Cr:Fe (1:1) chromium-enriched
Gaskets PTFE
Removal Rating ≥ 3 nm
Particle Removal Characteristics 109 particle reduction1
Connections 1/4 in, 1/2 in or 3/4 in Gasket Seal (VCR2 or compatible)
1/4 in buttweld or compression fitting
Leak Rating 100% helium leak tested to 10-9 atm cm3/sec Design validated to 10-11 atm cm3/sec
Design Pressure (Maximum Operating Pressure) Non-CE marked parts 20.7 MPa @ 50 ºC / 3000 psig @ 122 ºF
CE marked parts 13.8 MPa @ 50 ºC / 2000 psig @ 122 ºF
Maximum Allowable Differential Pressure 1.0 MPa @ 50 ºC / 145 psid @ 122 ºF

1Particle rating based on laboratory testing with NaCl aerosol.

2VCR is a trademark of Swagelok Co.

성능

Pressure Drop vs. Gas Flow Rate Curves

MLOX 03-30 Micro High Flow Membralox Assembly

MLOX 03-30 Micro High Flow Membralox Assembly

MLOX 03-225 Mini High Flow Membralox Assembly

MLOX 03-225 Mini High Flow Membralox Assembly

MLOX 05-900 5 in. High Flow Membralox Assembly

MLOX 05-900 5 in. High Flow Membralox Assembly

MLOX 028-225 Mini High Flow Membralox Assembly

MLOX 028-225 Mini High Flow Membralox Assembly

MLOX 03-600 High Flow Membralox Assembly

MLOX 03-600 High Flow Membralox Assembly

MLOX 11 in. High Flow Membralox Assembly

MLOX 11 in. High Flow Membralox Assembly

종류

Ceramic Filters

사용

Filtration

주문정보

Part Number* Fitting Type Nominal
Length (L)
(mm/inch)
Nominal
Diameter (D)
(mm/inch)
MLOX 03-30-1/4BW 14 in. Buttweld 84.1/3.31 20.8/0.82
MLOX 03-30-1/4GS-MM 14 in. Gasket Seal, Male/Male 84.1/3.31 20.8/0.82
MLOX 03-30-1/4CS 14 in. Compression Seal, Male/Male 84.1/3.31 20.8/0.82
MLOX 028-225-1/4GS-MF 14 in. Gasket Seal, Male/Female 71.1/2.80 29.7/1.17
MLOX 03-225-1/4BW 14 in. Buttweld 84.1/3.31 29.7/1.17
MLOX 03-225-1/4GS-MM 14 in. Gasket Seal, Male/Male 84.1/3.31 29.7/1.17
MLOX 03-225-1/2GS-MM 12 in. Gasket Seal, Male/Male 84.1/3.31 29.7/1.17
MLOX 03-600-1/4GS-MM 14 in. Gasket Seal, Male/Male 84.1/3.31 42.4/1.67
MLOX 03-600-1/2GS-MM 12 in. Gasket Seal, Male/Male 84.1/3.31 42.4/1.67
MLOX 05-900-1/4GS-MM 14 in. Gasket Seal, Male/Male 127.0/5.00 42.4/1.67
MLOX 05-900-1/2GS-MM 12 in. Gasket Seal, Male/Male 127.0/5.00 42.4/1.67
MLOX 11-2700-1/2GS-MM 12 in. Gasket Seal, Male/Male 285.1/11.22 42.4/1.67
MLOX 11-2700-3/4GS-MM 34 in. Gasket Seal, Male/Male 285.1/11.22 42.4/1.67
* For CE marked parts, add a "-CE" suffix to the part number (example, MLOX 03-30-1/4BW-CE). Other configurations are available upon request. Please consult Pall Microelectronics.


Unit Conversion: 1 bar = 100 kilopascals

적용분야

Process gas filtration

영역

Semiconductor

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