설명
The Membralox® ceramic filter assemblies are designed for ultra-high purity gas filtration applications, providing removal of particles ≥ 3 nanometer.
Products in this datasheet may be covered by one or more patents, including EP 442,410; US 5,143,614.
- Inert alumina medium with a precise pore structure
- 316L stainless steel housing
- Excellent temperature and corrosion resistance
- Superior dry down characteristics
- Clean room manufactured and packaged
- 100% helium leak tested
Products in this datasheet may be covered by one or more patents, including EP 442,410; US 5,143,614.
규격사양
Materials of Construction
| Filter Medium | High purity, inert alumina oxide |
| Internal Surface Finish | ≤ 0.38 μm / 15 μin Ra |
| Housing | Electropolished 316L stainless steel Housing material meets or exceeds VIM/VAR specifications. EU pressure equipment directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked. |
| Internal housing surface chemistry | Cr:Fe (1:1) chromium-enriched |
| Gaskets | PTFE |
| Removal Rating | ≥ 3 nm |
| Particle Removal Characteristics | 109 particle reduction1 |
| Connections | 1/4 in, 1/2 in or 3/4 in Gasket Seal (VCR2 or compatible) 1/4 in buttweld or compression fitting |
| Leak Rating | 100% helium leak tested to 10-9 atm cm3/sec Design validated to 10-11 atm cm3/sec |
| Design Pressure (Maximum Operating Pressure) | Non-CE marked parts 20.7 MPa @ 50 ºC / 3000 psig @ 122 ºF CE marked parts 13.8 MPa @ 50 ºC / 2000 psig @ 122 ºF |
| Maximum Allowable Differential Pressure | 1.0 MPa @ 50 ºC / 145 psid @ 122 ºF |
1Particle rating based on laboratory testing with NaCl aerosol.
2VCR is a trademark of Swagelok Co.
성능
Pressure Drop vs. Gas Flow Rate Curves
MLOX 03-30 Micro High Flow Membralox Assembly
MLOX 03-225 Mini High Flow Membralox Assembly
MLOX 05-900 5 in. High Flow Membralox Assembly
MLOX 028-225 Mini High Flow Membralox Assembly
MLOX 03-600 High Flow Membralox Assembly
MLOX 11 in. High Flow Membralox Assembly
종류
Ceramic Filters
사용
Filtration
주문정보
| Part Number* | Fitting Type | Nominal |
Nominal |
| MLOX 03-30-1/4BW | 1⁄4 in. Buttweld | 84.1/3.31 | 20.8/0.82 |
| MLOX 03-30-1/4GS-MM | 1⁄4 in. Gasket Seal, Male/Male | 84.1/3.31 | 20.8/0.82 |
| MLOX 03-30-1/4CS | 1⁄4 in. Compression Seal, Male/Male | 84.1/3.31 | 20.8/0.82 |
| MLOX 028-225-1/4GS-MF | 1⁄4 in. Gasket Seal, Male/Female | 71.1/2.80 | 29.7/1.17 |
| MLOX 03-225-1/4BW | 1⁄4 in. Buttweld | 84.1/3.31 | 29.7/1.17 |
| MLOX 03-225-1/4GS-MM | 1⁄4 in. Gasket Seal, Male/Male | 84.1/3.31 | 29.7/1.17 |
| MLOX 03-225-1/2GS-MM | 1⁄2 in. Gasket Seal, Male/Male | 84.1/3.31 | 29.7/1.17 |
| MLOX 03-600-1/4GS-MM | 1⁄4 in. Gasket Seal, Male/Male | 84.1/3.31 | 42.4/1.67 |
| MLOX 03-600-1/2GS-MM | 1⁄2 in. Gasket Seal, Male/Male | 84.1/3.31 | 42.4/1.67 |
| MLOX 05-900-1/4GS-MM | 1⁄4 in. Gasket Seal, Male/Male | 127.0/5.00 | 42.4/1.67 |
| MLOX 05-900-1/2GS-MM | 1⁄2 in. Gasket Seal, Male/Male | 127.0/5.00 | 42.4/1.67 |
| MLOX 11-2700-1/2GS-MM | 1⁄2 in. Gasket Seal, Male/Male | 285.1/11.22 | 42.4/1.67 |
| MLOX 11-2700-3/4GS-MM | 3⁄4 in. Gasket Seal, Male/Male | 285.1/11.22 | 42.4/1.67 |
* For CE marked parts, add a "-CE" suffix to the part number (example, MLOX 03-30-1/4BW-CE). Other configurations are available upon request. Please consult Pall Microelectronics.
Unit Conversion: 1 bar = 100 kilopascals
적용분야
Process gas filtration
영역
Semiconductor
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