1. Home/
  2. Microelectronics/
  3. Semiconductor/
  4. Process gas filtration/
  5. Gaskleen® TM Filter Assemblies 1 1/2'' C-Seal
Gaskleen® TM Filter Assemblies 1 1/2'' C-Seal product photo Primary L

Gaskleen® TM Filter Assemblies 1 1/2'' C-Seal

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.
  • 316L stainless steel housing
  • State-of-the-art nickel filter medium
  • High temperature and pressure capabilities
  • Excellent gas displacement and desorption characteristics
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment
  • No downstream welds
  • Minimum downstream volume
Products in this datasheet may be covered by one or more patents, including US 1,105,201.
Read More


Contact Us
* Required

설명

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.
  • 316L stainless steel housing
  • State-of-the-art nickel filter medium
  • High temperature and pressure capabilities
  • Excellent gas displacement and desorption characteristics
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment
  • No downstream welds
  • Minimum downstream volume
Products in this datasheet may be covered by one or more patents, including US 1,105,201.

규격사양

Materials

  • 316L stainless steel housing
  • State-of-the-art nickel filter
  • Housing meets or exceeds typical VIM / VAR specifications
  • Cr:Fe (1:1) chromium-enriched internal surface chemistry
  • ≤ 10 μin / 0.25 μm Ra internal surface finish

Removal Rating

  • ≥ 3 nm

Particle Removal Characteristics

  • 109 particle reduction at rated flow of 100 slpm

Connections

  • C-Seal, 11⁄2 in. interface

Leak Rating

  • 100% helium leak tested to 10-9 atm•cm3/s
  • Design validated to 10-11 atm•cm3/s

Operating Conditions

  • Maximum operating pressure: 5.2 MPa @ 100 °C / 750 psig @ 212 °F
  • Maximum allowable differential pressure: 0.69 MPa @ 38 °C / 100 psid @ 100 °F

성능

Pressure Drop vs. Gas Flow Rate*

Pressure Drop vs. Gas Flow Rate

종류

Filter Capsules

추가 정보

Dimensions

Dimensions

주문정보

Part Number Description Height (H)
(mm / in.)		 Width (W)
(mm / in.)		 Design Flow
Rate (slpm)
GTMN4600CC4 316L stainless steel housing Nickel filter 75.9 / 2.99 33.8 / 1.33 0 – 100

적용분야

Process gas filtration

영역

Semiconductor

Reviews

Earn 10% off* your next order online by leaving a review of this product. Please login to your account to leave a review. We appreciate and value your feedback.

*Subject to Terms and Conditions.