Ultramet-L® 4000 Series Filter Assembly product photo Primary L

Ultramet-L® 4000 Series Filter Assembly

The Ultramet-L® 4000 Series Filter Assembly is a unique, all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size for ease of installation
  • Wide variety of fitting options available
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • VAR PLUS housing material meets or exceeds VIM VAR specifications


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설명

The Ultramet-L® 4000 Series Filter Assembly is a unique, all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size for ease of installation
  • Wide variety of fitting options available
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • VAR PLUS housing material meets or exceeds VIM VAR specifications

규격사양

Filter Medium 316L stainless steel
Internal Surface Finish ≤ 7 μin / 0.18 μm Ra
Housing Electropolished 316L stainless steel
Housing material meets or exceeds VIM / VAR specifications
Removal Rating ≥ 3 nm
Particle Removal Characteristics 109 particle reduction up to 6 slpm / 0.2 scfm
104 particle reduction up to 75 slpm / 2.6 scfm
Connections 1⁄4", 1⁄2" Gasket Seal, Male / Male (VCR1 or compatible)
1⁄4" Compression Seal, Male / Male (Swagelok1 or compatible)
1⁄4" Butt Weld (0.035" / 0.89 mm wall)
Leak Rating 100% helium leak tested to 10-9 atm•cc/s
Design validated to 10-11 atm•cm3/s
Maximum Operating Pressure 3000 psig @ 100 °F / 207 bar @ 38 °C
1685 psig @ 840 °F / 1 16 bar @ 450 °C
Maximum Allowable Differential Pressure 125 psid @ 100 °F / 8.6 bar @ 38 °C
60 psid @ 840 °F / 4.1 bar @ 450 °C
EU pressure equipment directive Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU

1 VCR and Swagelok are trademarks of Swagelok Co.

성능

 

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate

종류

Assemblies

사용

Filtration

추가 정보

Dimensions

Dimensions

주문정보

Part Number Description Length (L)
(in. / mm)
GLFF4000VM4 14 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 (L1)
GLFF4000SM4 14 in. Compression Seal (Swagelok or Compatible) Male/Male 2.88 / 73 (L1)
GLFF4000BW4 14 in. Butt Weld, 0.035 in. / 0.89 mm wall 1.75 / 45 (L2)
GLFF4000VMM8 12 in. Gasket Seal (VCR or Compatible) Male/Male 3.35 / 85 (L1)

Unit conversion: 1 bar = 100 kilopascals

적용분야

Process gas filtration

영역

Semiconductor

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