설명
The Micro Kleen-Change® gas Filter Assembly is designed for low pressure ultra high purity, point-of-use gas applications. The all fluoro-polymer assembly eliminates metal components and elastomer seals by welding an all fluoro-polymer element into an all PFA housing.
- All fluoro-polymer element
- No elastomeric seals
- Wide range of chemical compatibility
- Ideally suited for use in corrosive environments/locations
- Eliminates metal components
- Cleanroom manufactured and packaged
- 100% integrity tested
Recommended Applications
- Low pressure nitrogen
- Lithography track tools
규격사양
Materials
- Media: PTFE
- Shell, core, and end caps: PFA440HP
Removal Ratings
- ≥ 0.003 μm
Filter Area
- 13.5 cm2 / 2.1 in2
Connections: Inlet/Outlet
- 1⁄8 in. Swagelok,1 Male/Male
Operating Conditions
- Maximum operating pressure: 58 psi @ 77 °F / 4 bar @ 25 °C
Packaging
- Double bagged
- N2 purged
1 Swagelok is a registered trademark of Swagelok Co.
성능
Pressure Drop vs. Gas Flow Rate
종류
Filter Capsules
추가 정보
Dimensions
주문정보
| Part Number | Description | Length (L) (in. / mm) |
| GDF3101SW2 | 1⁄8 in. Swagelok fitting, Male inlet/outlet | 2.9 / 73 |
Unit conversion: 1 bar = 100 kilopascals
적용분야
Process gas filtration
영역
Semiconductor
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