설명
The SGH filter housings are designed for ultra-high purity bulk gas applications in the semiconductor industry.
- Clean "sweep tube" design
- Easy cartridge changeout
- Available in three bowl lengths
- Available in 3 or 12 around configurations
- Through bolt closure
- Code 7 (-226 double o-ring with locking tab and finned end) cartridge adaptor
규격사양
Materials
Medium | All-316L stainless steel |
Internal surface treatment | Electropolished |
Surface finish options | ≤ 0.25 μm (10 μin) Ra or ≤ 0.63 μm (25 μin) Ra |
O-ring seal | Fluorocarbon |
Connections
3 around |
|
12 around |
|
Operating Conditions
Maximum allowable working pressure |
|
Certifications
EU Pressure Equipment Directive | Housings have been evaluated for compliance with the European Union's Pressure Equipment Directive 97/23/EC and are CE marked |
ASME | Housings are designed, manufactured and stamped in accordance with the ASME BPVC Section VIII, Div. 1, including latest addendum |
Leak Rating
- 100% Helium leak tested to 10-8 atm-cm3/s
종류
Housings, Vessels, or Assemblies
추가 정보
Dimensions
![Dimensions Dimensions](/INTERSHOP/static/WFS/PALL-PALLUS-Site/-/PALL/en_US/images/Microelectronics/sgh_filter_housing_chart1.jpg)
Number of cartridges | Filter length | Nominal length (L1) (mm / in.) | Nominal diameter (D) (mm / in.) | Face-to-face Dimensions (L2) (mm / in.) | |
SG[ ]H32 | 3 | 508 / 20 | 1,295 / 51 | 219 / 8.63 | 508 / 20 |
SG[ ]H33 | 3 | 762 / 30 | 1,549 / 61 | 219 / 8.63 | 508 / 20 |
SG[ ]H34 | 3 | 1,016 / 40 | 1,803 / 71 | 219 / 8.63 | 508 / 20 |
SG[ ]H122 | 12 | 508 / 20 | 1,549 / 61 | 356 / 14 | 768 / 30.25 |
SG[ ]H123 | 12 | 762 / 30 | 1,803 / 71 | 356 / 14 | 768 / 30.25 |
SG[ ]H124 | 12 | 1,016 / 40 | 2,057 / 81 | 356 / 14 | 768 / 30.25 |
Please contact Pall Microelectronics for detailed dimensions on specific housing part numbers.
주문정보
SG [1] H [2] [3] G7BW [4] - [5]
Table 1
Code | Internal surface finish |
Blank | ≤ 0.63 μm / 25 μin Ra |
L | ≤ 0.25 μm / 10 μin Ra |
Table 2
Code | Number of cartridges per housing |
3 | 3 around |
12 | 12 around |
Table 3
Code | Nominal cartridge length (mm / in.) |
2 | 508 / 20 |
3 | 762 / 30 |
4 | 1,016 / 40 |
Table 4
Code | Inlet / outlet connections |
32 | 2 inch tube x 0.065 wall |
48 | 3 inch tube x 0.065 wall |
64 | 4 inch tube x 0.083 wall |
Table 5
Code | Pressure vessel code |
Blank | ASME code, U-Stamp |
CE | CE marked |
적용분야
Process gas filtration, Process gas filtration
영역
Photovoltaics, Semiconductor
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