설명
ChamberKleen diffusers are ideally suited for vent applications on load lock interfaces or other vacuum chambers where large volumes of gas are flowing in a short amount of time.
Features
- Reduced turbulent flow during venting of process chambers
- High differential pressure capability
- 316L stainless steel housing
- Filters wide variety of gases
- Cleanroom manufactured and packaged
규격사양
Materials |
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Particle Removal Rating |
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Connections |
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Maximum Vent-Up Cycles |
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Operating Conditions |
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Design Flow Rate |
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성능
Pressure Drop vs. Gas Flow Rate
![Pressure Drop vs. Gas Flow Rate Pressure Drop vs. Gas Flow Rate](/INTERSHOP/static/WFS/PALL-PALLKR-Site/-/PALL/en_US/images/Microelectronics/ChamberKleenDiffusers_NW40NW50_graphic1.jpg)
Pressure vs. Chamber Fill Time
![Pressure vs. Chamber Fill Time Pressure vs. Chamber Fill Time](/INTERSHOP/static/WFS/PALL-PALLKR-Site/-/PALL/en_US/images/Microelectronics/ChamberKleenDiffusers_NW40NW50_graphic2.jpg)
종류
Filter Capsules
추가 정보
Dimensions
![NW40 NW40](/INTERSHOP/static/WFS/PALL-PALLUS-Site/-/PALL/en_US/images/Microelectronics/ChamberKleen_Diffusers_NW40-NW50_graphic1.jpg)
![NW50 NW50](/INTERSHOP/static/WFS/PALL-PALLUS-Site/-/PALL/en_US/images/Microelectronics/ChamberKleen_Diffusers_NW40-NW50_graphic2.jpg)
주문정보
Part Number | Description | Nominal Diameter (D) (mm / in.) | Nominal Length (L) (mm / in.) |
CK4000I40H | NW40 ISO vacuum flange | 55 / 2.16 | 49 / 1.93 |
CK4000I50H | NW50 ISO vacuum flange | 75 / 2.95 | 49 / 1.93 |
적용분야
Process gas filtration
영역
Semiconductor
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