HiP Kleen-Change® Assembly product photo Primary L

HiP Kleen-Change® Assembly

The Pall HiP Kleen-Change filter is a compact capsule assembly. It is ideally suited for high pressure DI Water filtration at the point-of-use.

The innovative capsule filter is designed to provide tightly controlled water spray delivery in single wafer cleaning applications.

The hyper-fine pore membrane is designed to provide a significant improvement in particle retention with a superior flow rate.

Features

  • 20 nm retention using hyper-fine porous PTFE membrane construction
  • Streamlined flow reduces pressure drop
  • All wetted parts are metal-free and suitable for pure water contact
  • Designed for high pressure operation to 10 MPa / 1,450 psig
  • Provided prewet
  • Compact filter size for point-of-use
  • High flow rates available to 100 mL/min


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설명

The Pall HiP Kleen-Change filter is a compact capsule assembly. It is ideally suited for high pressure DI Water filtration at the point-of-use.

The innovative capsule filter is designed to provide tightly controlled water spray delivery in single wafer cleaning applications.

The hyper-fine pore membrane is designed to provide a significant improvement in particle retention with a superior flow rate.

Features

  • 20 nm retention using hyper-fine porous PTFE membrane construction
  • Streamlined flow reduces pressure drop
  • All wetted parts are metal-free and suitable for pure water contact
  • Designed for high pressure operation to 10 MPa / 1,450 psig
  • Provided prewet
  • Compact filter size for point-of-use
  • High flow rates available to 100 mL/min

규격사양

 
Materials of Construction
  • Filter medium: Surface modified PTFE
  • Media support: HDPE
  • End cap: HDPE
  • Inner core: HDPE
  • Connection: M6xl
  • Connection material:PEEK
  • Internal capsule: PFA
  • Housing shell: SUS304
  • O-ring: Fluoroelastomer
Removal Rating
  • 20 nm
Configuration
  • In-line
Filter Area
  • 50 cm2 / 7.75 inch2
Maximum Operating Temperature
  • 60 ºC / 140 ºF
Maximum Operating Pressure (gage)
  • 10 MPa (1450 psi) ≤ 60 ºC (140 ºF)
Maximum Forward Differential Pressure
  • 0.34 MPa (49 psid) @ 60 ºC (140 ºF)
 


Dimensions

Dimensions

성능

Pressure Drop vs. Liquid Flow Rate1

Pressure Drop vs. Liquid Flow Rate
1 For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.

종류

Filter Capsules

주문정보

Part Number - LDSN04GPK02E11-K13

적용분야

Wet etch & cleans

영역

Semiconductor

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