Ultipleat® SP DR Filters and Ultipleat® SP DR KC Assemblies product photo Primary L

Ultipleat® SP DR Filters and Ultipleat® SP DR KC Assemblies

The Pall Ultipleat SP DR filter is designed specifically for high flow and improved particle removal in critical surface preparation chemical baths such as HF and BOE. The SP DR filter features a highly asymmetrical membrane construction, developed using Pall's proprietary membrane modeling technology (MMT).

The pore size distribution of the membrane uniformly transitions from microporous to nanoporous throughout its depth. The result is a new, application-specific membrane morphology designed for deep submicron retention of particles down to 2 nanometers. This retention is achieved without the flow restriction limitations of conventional membrane pore structures.

The 2 , 5 and 10 nanometer Ultipleat SP DR filters utilize a native polyarylsulfone membrane with over 40% higher surface energy than typical surface modified nondewet PTFE membranes.

The Ultipleat SP DR SWD capsules are space-saving and low pressure drop disposable filter units. They are ideally suited for installing into single wafer cleaning systems.
  • MMT-enhanced dual retention of particles
  • Superior HF filtration
  • Higher flow rates and longer life
  • Hyperfine microporous membrane matrix
  • High surface energy membrane for minimized microbubble formation
  • Faster tool qualification for reduced cost of ownership
  • Compact space-saver small capsules


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설명

The Pall Ultipleat SP DR filter is designed specifically for high flow and improved particle removal in critical surface preparation chemical baths such as HF and BOE. The SP DR filter features a highly asymmetrical membrane construction, developed using Pall's proprietary membrane modeling technology (MMT).

The pore size distribution of the membrane uniformly transitions from microporous to nanoporous throughout its depth. The result is a new, application-specific membrane morphology designed for deep submicron retention of particles down to 2 nanometers. This retention is achieved without the flow restriction limitations of conventional membrane pore structures.

The 2 , 5 and 10 nanometer Ultipleat SP DR filters utilize a native polyarylsulfone membrane with over 40% higher surface energy than typical surface modified nondewet PTFE membranes.

The Ultipleat SP DR SWD capsules are space-saving and low pressure drop disposable filter units. They are ideally suited for installing into single wafer cleaning systems.
  • MMT-enhanced dual retention of particles
  • Superior HF filtration
  • Higher flow rates and longer life
  • Hyperfine microporous membrane matrix
  • High surface energy membrane for minimized microbubble formation
  • Faster tool qualification for reduced cost of ownership
  • Compact space-saver small capsules

규격사양

Materials of Construction

 
Components Materials
Filter Medium Polyarylsulfone
Support and drainage Polyethylene
Core,cage and end caps Polyethylene
Sealing method Melt seal
Housing Polyethylene
O-ring options FEP encapsulated fluoroelastomer
 

 
Product Name Ultipleat SP DR KC Assemblies Ultipleat SP DR SWD Capsules
Removal Ratings 30 nm 10 nm 10 nm 5 nm 2 nm
Media Wettability Hydrophilic Hydrophobic Hydrophobic
Configurations Inline Inline U-flow
Filter Areas 1.2 m2 / 12.9 ft2 0.8 m2 / 8.6 ft2 0.25 m2 / 2.7 ft2 0.20 m2 / 2.2 ft2
Maximum Operating Temperature 50 °C / 122 °F 60 °C / 140 °F
Maximum Operating Pressure 0.39 MPaG / 57 psig ‹ 25 °C / 77 °F
0.15 MPaG / 21 psig ‹ 50 °C / 122 °F
0.35 MPaG / 51 psig ‹ 38 °C / 100 °F
0.17 MPaG / 25 psig ‹ 60 °C / 140 °F
Maximum Forward Differential Pressure 0.1 MPa / 15 psid @ 50 °C / 122 °F 0.1 MPa / 15 psid @ 60 °C / 140 °F
 

 
Product Name Ultipleat SP DR Filters
Removal Ratings 30 nm 10 nm
Media Wettability Hydrophilic Hydrophobic
Configurations 254 mm / 10 in 229 mm / 9 in 254 mm / 10 in 229 mm / 9 in
Filter Areas 1.5 m2 / 16.1 ft2 1.3 m2 / 14.0 ft2 1.0 m2 / 10.8 ft2 0.98 m2 / 10.6 ft2
Maximum Operating Temperature 70 °C / 158 °F
Maxiimum Forward Differential Pressure 0.1 MPa / 15 psid @ 70 °C / 158 °F
 


Dimensions (Nominal)


성능

Pressure Drop vs. Liquid flow Rate1 (Water, 20℃)


1Typical flow rates. For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.

종류

Filter Cartridges

주문정보

Part Numbers / Ordering Information3
Ultipleat SP DR KC Assemblies

LDDN09 [Table 1] [Table 2] E51 [Table 3]

Table 1

 
Code Removal Ratings
HSVH 10 nm
UHSQ 30 nm
 

Table 2

 
Code Inlet / Outlet Vent / Drain Flow
12 34 in. male flare style 12 in. male flare style Inline
164 1 in. male flare style 14 in. male flare style Inline
 

Table 3

 
Code Prewet Option Scope
None Dry 30 nm only
-K3 Prewet filter (packaged in DI water) 10 nm only
-K6 Dry, Low metal extractables2 30 nm only
-K13C Prewet filter (packaged in DI water), Low metal extractables2 10 nm only
 


Ultipleat SP DR SWD Capsules

SWD03 [Table 1] 4E71 [Table 2]


Table 1

 
Code Removal Ratings
HSAH 2 nm
HSSH 5 nm
HSVH 10 nm
 
Connections (Inlet/Outlet, Vent: 14 in , Super Pillar4 300 P series (Nippon Pillar)

Table 2

 
Code Prewet Option Scope
-K13C Prewet filter ( packaged in DI water), Low metal extractables2 5 nm, 10 nm only
-K13D Prewet filter ( packaged in DI water), Low metal extractables2 2 nm only
 


Ultipleat SP DR Filters

ABD [1] [2] 3EH1 [3]


Table 1

 
Code Cartidge Length (Nominal)
04 102 mm / 4 in.
09 229 mm / 9 in.
1 254 mm / 10 in.
2 508 mm / 20 in.
3 762 mm / 30 in.
 

Table 2

 
Code Removal Ratings
HSVH 10 nm
UHSQ 30 nm
 

Table 3

 
Code Prewet Option Scope
None Dry 30 nm only
-K3 Prewet filter (packaged in DI water) 10 nm only
-K6 Dry, Low metal extractables2 30 nm only
-K13C Prewet filter (packaged in DI water), Low metal extractables2 10 nm only
 
2 Please contact Pall for the extractable conditions.
3 Part numbers in combination with all codes are not always available.
Please contact Pall for the part number availability.
4 Pillar is a trademark of Nippon Pillar Packing Co.

적용분야

Wet etch & cleans

영역

Semiconductor

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