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SWD and SWF Small Capsules for POU product photo Primary L

SWD and SWF Small Capsules for POU

The Pall SWD and SWF small capsules are space-saving and low pressure drop disposable filter assemblies. They are ideally suited for installing into single wafer cleaning systems at the point of use (POU) .

The unique fluid flow path filter design combined with Pall material science membrane technology provides the reliable removal of critical nanometer size contaminants in fluids to prevent defects on wafers.

The SWD capsule contains Pall’s proprietary Ultipleat® SP DR “HAPAS”1 membrane filter. The HAPAS membrane is designed specifically for improved particle removal in critical surface preparation single wafer cleaning chemicals such as DHF, UPW, SC1, SC2, TMAH and many aqueous chemicals. The SP DR filter features a highly asymmetrical membrane construction developed using Pall’s proprietary membrane modeling technology (MMT).

The pore size distribution of the HAPAS membrane transitions uniformly from microporous to nanoporous throughout its depth. The result is an application-specific membrane morphology designed for high flow and superior retention of particles down to 2 nanometers.

The SWF capsule contains Pall’s proprietary XpressKleenTM filter. The XpressKleen filter uses a new generation of surface modified and patent pending PTFE membrane designed for leading edge critical chemical processes. Applications include concentrated chemicals, IPA, DIO3 and other solvents.

Pall's completely integrated and advanced filter manufacturing capability extends from the PTFE resin to the finished filter device. The resulting filter’s reliability, purity, and ultra cleanliness speeds qualification and reduces process downtime following filter change.

Features

  • Hyperfine microporous membrane matrix
  • High surface energy membrane for minimal microbubble formation
  • Faster tool qualification for reduced cost of ownership
  • 100% prewetted shipment with ultrapure water package
  • Compact space-saver, small capsules

Ideal filter installation before chemical dispense

Ideal filter installation before chemical dispense


1 HAPAS - Highly Asymmetric PolyArylSulfone membrane

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설명

The Pall SWD and SWF small capsules are space-saving and low pressure drop disposable filter assemblies. They are ideally suited for installing into single wafer cleaning systems at the point of use (POU) .

The unique fluid flow path filter design combined with Pall material science membrane technology provides the reliable removal of critical nanometer size contaminants in fluids to prevent defects on wafers.

The SWD capsule contains Pall’s proprietary Ultipleat® SP DR “HAPAS”1 membrane filter. The HAPAS membrane is designed specifically for improved particle removal in critical surface preparation single wafer cleaning chemicals such as DHF, UPW, SC1, SC2, TMAH and many aqueous chemicals. The SP DR filter features a highly asymmetrical membrane construction developed using Pall’s proprietary membrane modeling technology (MMT).

The pore size distribution of the HAPAS membrane transitions uniformly from microporous to nanoporous throughout its depth. The result is an application-specific membrane morphology designed for high flow and superior retention of particles down to 2 nanometers.

The SWF capsule contains Pall’s proprietary XpressKleenTM filter. The XpressKleen filter uses a new generation of surface modified and patent pending PTFE membrane designed for leading edge critical chemical processes. Applications include concentrated chemicals, IPA, DIO3 and other solvents.

Pall's completely integrated and advanced filter manufacturing capability extends from the PTFE resin to the finished filter device. The resulting filter’s reliability, purity, and ultra cleanliness speeds qualification and reduces process downtime following filter change.

Features

  • Hyperfine microporous membrane matrix
  • High surface energy membrane for minimal microbubble formation
  • Faster tool qualification for reduced cost of ownership
  • 100% prewetted shipment with ultrapure water package
  • Compact space-saver, small capsules

Ideal filter installation before chemical dispense

Ideal filter installation before chemical dispense


1 HAPAS - Highly Asymmetric PolyArylSulfone membrane

규격사양

Product Name XpressKleen SWF Capsules Ultipleat SP DR SWD Capsules
Membrane Materials Surface modified PTFE Highly Asymmetric PolyArylSulfone (HAPAS)
Hardware (Supports, Capsule) PFA HDPE
Removal Ratings 5 nm 10 nm       | 5 nm       | 2 nm
Filter Areas 0.3 m2 / 3.2 ft2 0.25 m2 / 2.7 ft2        | 0.2 m2 / 2.2 ft2
Configurations U-flow U-flow
Connections (Inlet / Outlet, Vent) 1/4”, Super Pillar2 300 P series (Nippon Pillar)
Maximum Operating Temperature 130 °C / 266 °F 60 °C / 140 °F
Maximum Operating Pressure 0.35 MPaG / 50 psig @ 40 °C / 104 °F
0.29 MPaG / 42 psig @ 60 °C / 140 °F
0.24 MPaG / 34 psig @ 80 °C / 176 °F
0.20 MPaG / 29 psig @ 95 °C / 203 °F
0.18 MPaG / 26 psig @ 110 °C / 230 °F
0.15 MPaG / 21 psig @ 130 °C / 266 °F		 0.35 MPaG / 51 psig @ 38 °C / 100 °F
0.17 MPaG / 25 psig @ 60 °C / 140 °F
Maximum Forward Differential Pressure 0.20 MPaG / 29 psig @ 95 °C / 203 °F
0.15 MPaG / 21 psig @ 130 °C / 266 °F		 0.1 MPaG / 15 psig @ 60 °C / 140 °F

2 Pillar is a trademark of Nippon Pillar Packing Co.

종류

Filter Capsules

추가 정보

Dimensions (nominal)

SWF_Capsules SWD_Capsules

Typical Flow Characteristics - 1cP fluid, 20℃

XpressKleen SWF Capsules Ultipleat SP DR SWD Capsules

XpressKleen SWF Capsules Ultipleat SP DR SWD Capsules

주문정보

Part Numbers / Ordering Information

SW [1] 03 [2] 4E71 [3]

Table 1

 
Code Capsule Format Capsule Materials
D SWD HDPE
F SWF PFA
 

Table 2

 
Code Removal Ratings Media Materials Capsule Format Availability
HSAH 2 nm HAPAS SWD
HSSH 5 nm HAPAS SWD
HSVH 10 nm HAPAS SWD
XP5 5 nm PTFE SWF
 

Table 3

 
Code Prewet option Applicable Capsule Note
None Standard with low extractables SWF
-K18 Dry with low extractales SWF Nuts are not included in the box.
-K13C Standard with low extractables SWD
-K13D Standard with low extractables for 2 nm only SWD

Connections (Inlet/Outlet, Vent) : 1/4”, Super Pillar 300 P series (Nippon Pillar)

영역

Semiconductor

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