Small Flow Emflon® Filter (Gas Filtration) product photo Primary L

Small Flow Emflon® Filter (Gas Filtration)

Emflon® filter elements are designed for ≥ 3 nanometer (0.003 μm) filtration of inert gas applications used in the production of semiconductor devices.
  • Wide variety of applications
  • High particle removal efficiency
  • Flow rates up to 50 scfm
  • High flow rates vs. differential pressure
  • Optimized cartridge design
  • Manufactured in a cleanroom environment
  • 100% integrity tested


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Description
Emflon® filter elements are designed for ≥ 3 nanometer (0.003 μm) filtration of inert gas applications used in the production of semiconductor devices.
  • Wide variety of applications
  • High particle removal efficiency
  • Flow rates up to 50 scfm
  • High flow rates vs. differential pressure
  • Optimized cartridge design
  • Manufactured in a cleanroom environment
  • 100% integrity tested
Specifications

Materials

  • Medium: PTFE
  • Core, cage, and end caps: Polypropylene
  • Support and drainage: Polypropylene
  • O-rings: Viton1, Viton-A

Removal Rating

  • ≥ 0.003 μm

Configurations

  • Nominal length:
    • 1 in./25 mm
    • 1.75 in./44 mm
    • 2.5 in./64 mm
    • 5 in./127 mm
  • Diameter: 2.18 in./55 mm
  • O-ring size/end caps:
    • 115 internal/flat end (9106/9112)
    • 116 internal/flat end (2230/4463)
    • 118 external/flat end (4440)
    • 209 internal/flat end (9130/9163)

Operating Conditions

  • Maximum Temperature: 194 °F/90 °C
  • Maximum Forward Differential Pressure:
    • 80 psid @ 120 °F/5.5 bar @ 50 °C
    • 50 psid @ 194 °F/3.5 bar @ 90 °C
1 Viton is a trademark of DuPont Dow Elastomers
Performance

Pressure Drop vs. Gas Flow Rate

Cartridge Style Junior 9106/9112

Cartridge Style Junior 9106/9112

Cartridge Style Junior 4440

Cartridge Style Junior 4440

Cartridge Style Junior 2230/9130

Cartridge Style Junior 2230/9130

Cartridge Style Junior 4463/9163

Cartridge Style Junior 4463/9163
Type
Cartridges and Elements
Use
Filtration
Ordering Information
Part Number Removal Rating (μm) Nominal Length (in. / mm) O-Ring Size/Material
MCY9106FREH 0.003 1 / 25 115 / Viton (Internal)
MCY9112FREH 0.003 1.75 / 44 115 / Viton (Internal)
MCY9130FREH 0.003 2.5 / 64 209 / Viton (Internal)
MCY9163FREH 0.003 5 / 127 209 / Viton (Internal)
MDY2230FREHF 0.003 2.5 / 64 116 / Viton A (Internal)
MCY4463FREHF 0.003 5 / 127 116 / Viton A (Internal)
MCY4440FREHF 0.003 5 / 127 118 / Viton A (External)

Unit conversion: 1 bar = 100 kilopascals
Application
Process gas filtration