
Ultramet-L® 6600 Series Filter Assembly
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Description
The Ultramet-L® 6600 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
- All 316L stainless steel construction
- State-of-the-art 316L stainless steel media
- Preconditioned to ultraclean levels
- Accommodates extremely high flow rates for assembly size
- Excellent gas displacement and desorption characteristics
- High temperature and pressure capabilities
- 100% helium leak tested
- Cleanroom manufactured and packaged
- CE marked in accordance with PED 97/23/EC
Specifications
1 The 6600 Series Filter Assembly is also available with a nickel filter. Contact Pall Microelectronics for more information.
Materials
- Electropolished 316L stainless steel housing
- 316L stainless steel filter media1
- Internal surface finish: 6601: ≤ 10 μin / 0.25 mm Ra / 6602: ≤ 0.7 μm Rmax
- Cr:Fe (1:1) Chromium enriched internal surface chemistry
- VAR PLUS housing material meets or exceeds typical VIM/VAR specifications
- Housing material meets or exceeds VIM/VAR specifications
Removal Rating
- ≥ 0.003 μm
Preconditioned Cleanliness
- < 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD)
- < 10 ppb THC contribution (Qualified per SEMASPEC test method #90120396B-STD)
- < 10 ppb O2 contribution (Qualified per SEMASPEC test method #90120398B-STD)
- < 1 particle/(ft3 or m3) particle contribution above background
Connections
- 1⁄2 in. Gasket Seal, Male/Male (VCR2 or compatible)
Operating Conditions
- Maximum Operating Pressure:
- 750 psig @ 100 °F/52 bar @ 38 °C
- 550 psig @ 800 °F/38 bar @ 426 °C for inert gases only
- Maximum Forward Differential Pressure:
- 30 psid @ 68 °F/2.1bar @ 20 °C
- 15 psid @ 800 °F/1 bar @ 426 °C inert gases only
Particle Removal Characteristics
- 109 particle reduction up to 320 slpm/11.3 scfm
Leak Rating
- 100% helium leak tested to 10-9 atm•cm3/s
- Design validated to 10-11 atm•cm3/s
1 The 6600 Series Filter Assembly is also available with a nickel filter. Contact Pall Microelectronics for more information.
2 VCR is a registered trademark of Swagelok Co.
Performance

Pressure Drop vs. Gas Flow Rate
76 mm Ultramet-L Assemblies

Type
Assemblies
Use
Filtration
Additional Information

Dimensions

Ordering Information
Unit conversion: 1 bar = 100 kilopascals
Part Number | Description | ||
GLFF6601VMM8 | 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male, ≤ 10 μin / 0.25mm Ra | 6.06 / 154 | 3.02 / 76.7 |
GLFF6602VMM8 | 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male, ≤ 0.7 μm Rmax | 6.06 / 154 | 3.02 / 76.7 |
Unit conversion: 1 bar = 100 kilopascals
Application
Process gas filtration