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Ultramet-L® 6600 Series Filter Assembly product photo Primary L

Ultramet-L® 6600 Series Filter Assembly

The Ultramet-L® 6600 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 1.5 nanometer (0.001.5 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Preconditioned to ultraclean levels
  • Accommodates extremely high flow rates for assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • CE marked in accordance with PED 97/23/EC
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Datasheets

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The Ultramet-L® 6600 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 1.5 nanometer (0.001.5 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Preconditioned to ultraclean levels
  • Accommodates extremely high flow rates for assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • CE marked in accordance with PED 97/23/EC
Filter Medium 316L stainless steel1
Internal Surface Finish 6601: ≤ 10 μin / 0.25 μm Ra
6602: ≤ 0.7 μm Rmax
Housing Electropolished 316L stainless steel
Housing material meets or exceeds VIM / VAR specifications
Removal Rating ≥ 1.5 nm
Preconditioned Cleanliness <10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD)
<10 ppb THC contribution (Qualified per SEMASPEC test method #90120396B-STD)
<10 ppb O2 contribution (Qualified per SEMASPEC test method #90120398B-STD)
<1 particle/(ft3 or m3) particle contribution above background
Connections 1⁄2" Gasket Seal, Male / Male (VCR2 or compatible)
Leak Rating 100% helium leak tested to 10-9 atm•cm3/s
Design validated to 10-11 atm•cm3/s
Maximum Operating Pressure 750 psig @ 100 °F/52 bar @ 38 °C 550 psig @ 800 °F/38 bar @ 426 °C for inert gases only
Maximum Forward Differential Pressure 30 psid @ 68 °F/2.1bar @ 20 °C 15 psid @ 800 °F/1 bar @ 426 °C inert gases only
Particle Removal Characteristics 109 particle reduction up to 320 slpm/ 11.3 scfm
EU pressure equipment directive Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU

1 The 6600 Series Filter Assembly is also available with a nickel filter. Contact Pall Microelectronics for more information.
2 VCR is a registered trademark of Swagelok Co.

Pressure Drop vs. Gas Flow Rate

76 mm Ultramet-L Assemblies

76 mm Ultramet-L Assemblies
Assemblies
Filtration
Part Number Description Length (L)
(in./mm)		 Diameter (D)
(in./mm)
GLFF6601VMM8 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male,
≤ 10 μin / 0.25mm Ra		 6.06 / 154 3.02 / 76.7
GLFF6602VMM8 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male, ≤ 0.7 μm Rmax 6.06 / 154 3.02 / 76.7

Unit conversion: 1 bar = 100 kilopascals

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