Ultramet-L® 6600 Series Filter Assembly product photo Primary L

Ultramet-L® 6600 Series Filter Assembly

The Ultramet-L® 6600 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Preconditioned to ultraclean levels
  • Accommodates extremely high flow rates for assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • CE marked in accordance with PED 97/23/EC


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Description
The Ultramet-L® 6600 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Preconditioned to ultraclean levels
  • Accommodates extremely high flow rates for assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • CE marked in accordance with PED 97/23/EC
Specifications

Materials

  • Electropolished 316L stainless steel housing
  • 316L stainless steel filter media1
  • Internal surface finish: 6601: ≤ 10 μin / 0.25 mm Ra / 6602: ≤ 0.7 μm Rmax
  • Cr:Fe (1:1) Chromium enriched internal surface chemistry
  • VAR PLUS housing material meets or exceeds typical VIM/VAR specifications
  • Housing material meets or exceeds VIM/VAR specifications

Removal Rating

  • ≥ 0.003 μm

Preconditioned Cleanliness

  • < 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD)
  • < 10 ppb THC contribution (Qualified per SEMASPEC test method #90120396B-STD)
  • < 10 ppb O2 contribution (Qualified per SEMASPEC test method #90120398B-STD)
  • < 1 particle/(ft3 or m3) particle contribution above background

Connections

  • 12 in. Gasket Seal, Male/Male (VCR2 or compatible)

Operating Conditions

  • Maximum Operating Pressure:
    • 750 psig @ 100 °F/52 bar @ 38 °C
    • 550 psig @ 800 °F/38 bar @ 426 °C for inert gases only
  • Maximum Forward Differential Pressure:
    • 30 psid @ 68 °F/2.1bar @ 20 °C
    • 15 psid @ 800 °F/1 bar @ 426 °C inert gases only

Particle Removal Characteristics

  • 109 particle reduction up to 320 slpm/11.3 scfm

Leak Rating

  • 100% helium leak tested to 10-9 atm•cm3/s
  • Design validated to 10-11 atm•cm3/s
1 The 6600 Series Filter Assembly is also available with a nickel filter. Contact Pall Microelectronics for more information.
2 VCR is a registered trademark of Swagelok Co.
Performance

Pressure Drop vs. Gas Flow Rate

76 mm Ultramet-L Assemblies

76 mm Ultramet-L Assemblies
Type
Assemblies
Use
Filtration
Ordering Information
Part Number Description Length (L)
(in./mm)
Diameter (D)
(in./mm)
GLFF6601VMM8 12 in. Gasket Seal (VCR or Compatible) Male/Male,
≤ 10 μin / 0.25mm Ra
6.06 / 154 3.02 / 76.7
GLFF6602VMM8 12 in. Gasket Seal (VCR or Compatible) Male/Male, ≤ 0.7 μm Rmax 6.06 / 154 3.02 / 76.7

Unit conversion: 1 bar = 100 kilopascals
Application
Process gas filtration