Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Power & Utilities

ORG NORDEL EPDM PEROXIDE CURED

Product ID: T10540084
Unit of Measure
1/EA
Min Order Qty
1

U003AW40U

Product ID: U003AW40U
Unit of Measure
10/EA
Min Order Qty
10

PE100P2L

Product ID: PE100P2L
Unit of Measure
50/EA
Min Order Qty
50

Profile® Nylon, Filter Cartridges, Removal Rating 20 μm, Nylon, Length 40 Inches

Product ID: RGN4FN200
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1020 mm
Cartridge Length (Metric)
102 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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PAPER FILTER product photo

PAPER FILTER

Product ID: 3217332K910
Unit of Measure
2/EA
Min Order Qty
2

5P40U

Product ID: 5P40U
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD 900 300X900C516VP product photo

SUPRAdisc SD 900 300X900C516VP

Product ID: 7005974
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SDT 950 300T950C416VP product photo

SUPRAdisc SDT 950 300T950C416VP

Product ID: 7006071
Unit of Measure
1/EA
Min Order Qty
1
LMO10S-3/4HP product photo

LMO10S-3/4HP

Product ID: LMO10S34HP
Unit of Measure
1/EA
Min Order Qty
1
MPGH01020SOE product photo

MPGH01020SOE

Product ID: MPGH01020SOE
Unit of Measure
30/EA
Min Order Qty
30

NC075AW40A

Product ID: NC075AW40A
Unit of Measure
10/EA
Min Order Qty
10

P005RC30S 395

Product ID: P005RC30S395
Unit of Measure
5/EA
Min Order Qty
5
34 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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