Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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WS18 - 1/2" NPT 200mm Probe 10m Cable product photo

WS18 - 1/2" NPT 200mm Probe 10m Cable

Product ID: WS18DSB08L10
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AB2PYN18JDUP

Product ID: AB2PYN18JDUP
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 10 Inches, 316 stainless steel

Product ID: F005A10S1PK
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 30 Inches, 316 stainless steel

Product ID: F010AW30S1PK
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 20 Inches

Product ID: F010AW20A1PK
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10P30U

Product ID: 10P30U
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120-013-10 FILTER BAG

Product ID: 12001310FILTERBAG
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20C30A-EA

Product ID: 20C30AEA
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20U10U

Product ID: 20U10U
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3L1025W40A product photo

3L1025W40A

Product ID: 3L1025W40A
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel

Product ID: G001A10S1PK
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 316 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 316 stainless steel, Individually wrapped

Product ID: G005AW40S1PK
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118 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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