Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

DFT Classic®

Product Type

Filter Cartridges

C150AW20U product photo

C150AW20U

Product ID: C150AW20U
Unit of Measure
10/EA
Min Order Qty
10

CC20068C02

Product ID: CC20068C02
Unit of Measure
1/EA
Min Order Qty
1
CA26633C00 product photo

CA26633C00

Product ID: CA26633C00
Unit of Measure
1/EA
Min Order Qty
1

CC29129C00

Product ID: CC29129C00
Unit of Measure
1/EA
Min Order Qty
1

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 40 Inches, Polypropylene

Product ID: U025AW40U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
25 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 19.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 19.5 Inches, 316 stainless steel

Product ID: U200AW195SEC1S
Unit of Measure
10/EA
Min Order Qty
10

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 9.75 Inches, Polypropylene, Individually wrapped

Product ID: U005A975U1PK
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 20 Inches, Polypropylene, Individually wrapped

Product ID: U020AW20U1PK
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
20 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 304 stainless steel

Product ID: G030AW20A1PK
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
30 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

CC59221C00

Product ID: CC59221C00
Unit of Measure
1/EA
Min Order Qty
1

CC20068C01

Product ID: CC20068C01
Unit of Measure
1/EA
Min Order Qty
1

CC42583C00

Product ID: CC42583C00
Unit of Measure
1/EA
Min Order Qty
1
42 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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