Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Duo-Fine®

Industries

Industrial Manufacturing

Duo-Fine® , Filter Cartridges, Removal Rating 50 μm

Product ID: DFN501401
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
50 µm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
Cartridge Outer Diameter (OD) (Metric)
6.6 cm
Cage, Core
Polypropylene
Packaging Type
Standard packaging
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Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 10 Inches

Product ID: DFNT1010UN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches

Product ID: DFPT320ETM8563
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M8
End Configuration
SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5) 3
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Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN1040AN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, silicone, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT1020US
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine®, Filter Cartridges, Removal Rating 0.45 μm

Product ID: DFPT0454EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0) 3
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Nitrile

Product ID: DFN0230UNM26
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
Change Out Differential Pressure
2.4 bard
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE flat closed end external 222 O-rings

Product ID: DFNT04510UTM3
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.45 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 9.75 Inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: DFNT02975UNM3
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

RHODIADF330M3 177

Product ID: RHODIADF330M3177
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, SOE fin end external 226 O-rings

Product ID: DFN1040UEM7
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard

Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: DFN1030UVM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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191 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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