Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Accessories and Spare Parts

PLC, PROGRAMMED, HLP22

Product ID: 100009205
Unit of Measure
1/EA
Min Order Qty
1
109568-01 product photo

REPLACED BY 10956801

Product ID: 109568-01
Unit of Measure
1/EA
Min Order Qty
1

109568-01

Product ID: 10956801
Unit of Measure
12/EA
Min Order Qty
12

OIL FILTER

Product ID: 10026
Unit of Measure
1/EA
Min Order Qty
1

PLEATED PAPER ELEMENT 01-0086

Product ID: 10086
Unit of Measure
1/EA
Min Order Qty
1
114165-01 product photo

114165-01

Product ID: 11416501
Unit of Measure
1/EA
Min Order Qty
1

05-0627

Product ID: 05-0627
Unit of Measure
1/EA
Min Order Qty
1

114164-02

Product ID: 11416402
Unit of Measure
1/EA
Min Order Qty
1

VAC PUMP/MOTOR ASSY, HLP6, 460V

Product ID: 100047801
Unit of Measure
1/EA
Min Order Qty
1

109589-01

Product ID: 10958901
Unit of Measure
1/EA
Min Order Qty
1

115861-100

Product ID: 115861100
Unit of Measure
10/EA
Min Order Qty
10

HH9688E16CTSWEB59YQ36 (11417439-001)

Product ID: 11417439-001
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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