Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Industrial Manufacturing

Product Type

Accessories and Spare Parts

LBL1012-D63

Product ID: P2015447
Unit of Measure
1/EA
Min Order Qty
5

ORH1-335

Product ID: P2018262
Unit of Measure
1/EA
Min Order Qty
1

ORJ-344

Product ID: P2022218
Unit of Measure
1/EA
Min Order Qty
1

SA7017-075 LC

Product ID: P2029264
Unit of Measure
1/EA
Min Order Qty
1

ACP-3053D

Product ID: P2064542
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

16.00, 150,CGI,304/FCRB

Product ID: P2066400
Unit of Measure
1/EA
Min Order Qty
1

UHF-H13

Product ID: P2091635
Unit of Measure
1/EA
Min Order Qty
1
ORH1-435 product photo

ORH1-435

Product ID: P2093454
Unit of Measure
1/EA
Min Order Qty
1

2.875X2.281X.125X.046

Product ID: P2201224
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

MAHW1-1016FD

Product ID: P2240684
Unit of Measure
1/EA
Min Order Qty
1

PSS,316LB,P05,.045,18X60

Product ID: P2256802
Unit of Measure
1/IN2
Min Order Qty
1

PMF,316L,FA135 16X72 BEK

Product ID: P2257404
Unit of Measure
1/IN2
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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