Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

DFN 3-30AN-1X product photo

DFN 3-30AN-1X

Product ID: DFN330AN1X
Unit of Measure
12/EA
Min Order Qty
12

This product is currently not available. Please contact us for more information.

DFNE50040AV

Product ID: DFNE50040AV
Unit of Measure
12/EA
Min Order Qty
12

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT04520USM7
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, silicone, SOE fin end external 222 O-rings

Product ID: DFNT120USM8
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
End Configuration
SOE fin end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

DFNT 1-30UN-M7

Product ID: DFNT130UNM7
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

Duo-Fine®, Filter Cartridges, Removal Rating 0.2 μm, Length 40 Inches

Product ID: DFPT0240UGTMG7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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DFPT 1-30EV-M3 product photo

DFPT 1-30EV-M3

Product ID: DFPT130EVM3
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 39 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 39 Inches

Product ID: PFT0839UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT0840UVM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings

Product ID: PFT1010UTM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer

Product ID: PFT220UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 222 O-rings

Product ID: PFT3040UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
1,580 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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