Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Material of Construction

Iron|Steel

Family

Versalon

Versalon, 3625psi Simplex Hsg, 0.5in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: HZG210C08CNRG1X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
3625 psi
Port Size
0.5 in
Number of Cartridges
1
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Versalon, 6090psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: HZG410A16CSSG1X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1 in
Number of Cartridges
1
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HZG310A16CSRG11X160 FILTER ASSEMBLY

Product ID: HZG310A16CSRG00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
3625 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 6090psi Simplex Hsg, 1.25in SAE Ports, 10in Length, Fluorocarbon Seals

Product ID: HZG410A20CSKG1X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
10 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1.25 in
Number of Cartridges
1
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Versalon, 6090psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: HZG410C16CNRG1X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Versalon, 6090psi Simplex Hsg, 1.25in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZG410C20CNSGBX160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Versalon, 6090psi Simplex Hsg, 1.25in BSP Ports, 10in Length, Fluorocarbon Seals

Product ID: HZG410C20CSKGDX160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
10 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Versalon, 3625psi Simplex Hsg, M22x1.5-6H THDin, 8in Length, Fluorocarbon Seals

Product ID: HZG210P22KDSG0X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric ISO6149
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
3625 psi
Port Size
M22x1.5-6H THD in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

Versalon, 6090psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: HZG410C16CSRG1X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
21 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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