Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

FEP encapsulated fluorocarbon elastomer (O-rings)

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT2010UM18F
Unit of Measure
1/EA
Min Order Qty
1
Micron
20 micron

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT202725UM18F
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
End Configuration Code
M18
End Configuration
M18 - SOE flat closed end, external 222 O-ring
Cartridge Type
NXT
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Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 16.25 inches

Product ID: NXT251625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
25 micron

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT3020UM18F
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 16.25 inches

Product ID: NXT301625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE fin end external 226 O-rings

Product ID: NXT3030UM7F
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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NXT 3-10U-M3F product photo

Nexis, NXT, 3 μm, 25.4 cm (10 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), FEP encapsulated fluorocarbon elastomer (O-rings)

Product ID: NXT310UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT5010UM18F
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 16.25 inches

Product ID: NXT501625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: NXT5020UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 27.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 27.25 inches

Product ID: NXT502725UM18F
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: NXT510UM3F
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
See All Attributes
73 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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