Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Material of Construction

Aluminum

Athalon, 600psi Simplex Hsg, 1.25in BSP Ports, 20in Length, Fluorocarbon Seals

Product ID: UR210C2020ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 145psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: UT210C1604ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
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Athalon, 145psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: UT210C1604Z8
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
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Athalon, 145psi Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: UT210C1608ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
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Athalon, 145psi Simplex Hsg, 1.25in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: UT210C2013ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: UT210C1608Z9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 1in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: UT210C1613ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 1.25in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: UT210C2008ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Athalon, 145psi Simplex Hsg, 1in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: UT210C1613ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
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UT210C1608ZB ASSY HOUSING

Product ID: UT210C1608ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: UT210C1604ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 1.5in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: UT310C2408Z9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes
121 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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