Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

Product Use

Air, Gas, and Vent Filtration

AB3PH7H1

Product ID: AB3PH7H1
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® N66 Filter Cartridges, ABN3NB7BH4

Product ID: ABN3NB7BH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Nylon with integral polyester non-woven filtrate
Filter Cartridge Style
Code 7
Maximum Differential Pressure
5.4 bard @ < 50° C (122◦ F)
Cage, Core
Polypropylene
End Cap and Fin End
Unpigmented Nylon 6-10
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Emflon® PFA membrane filter cartridge, 0.2 µm bioburden reduction, 5-inch length, double-o-ring (silicone) with bayonet lock and flat end product photo

Emflon® PFA membrane filter cartridge, 0.2 µm bioburden reduction, 5-inch length, double-o-ring (silicone) with bayonet lock and flat end

Product ID: AB05PFA2PVH4
Unit of Measure
1/EA
Min Order Qty
1
Sterilization Option(s)
Suitable for Autoclave or SIP
Filter Cartridge Style
Code 2
Cartridge Length (Metric)
127 mm
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0.2UM Flourodyne II Membrane

Product ID: 20SXXM
Unit of Measure
1/FT
Min Order Qty
1
16 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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