Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Sub Type

Depth Filters

Product Type

Filter Cartridges

Product Use

Pre-Filtration

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps

Product ID: NXT10010UDOET
Unit of Measure
60/EA
Min Order Qty
60
Micron
100 micron

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps

Product ID: NXT1010UDOET
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 16.25 inches

Product ID: NXT51625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches

Product ID: NXT2040U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT20010UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 16.25 inches

Product ID: NXT251625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
25 micron
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: NXT10040UM18N
Unit of Measure
24/EA
Min Order Qty
24
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 27.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 27.25 inches

Product ID: NXT502725UM18F
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 39 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 39 inches

Product ID: CLR3039
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
Length
102 cm / 40 in
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches

Product ID: NXT510U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
5 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches

Product ID: CLR30195
Unit of Measure
24/EA
Min Order Qty
24
Micron
30 micron
Length
49.5 cm / 19.5 in
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches

Product ID: CLR520
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
Length
50.8 cm / 20 in
107 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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