Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industrial Manufacturing

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Product Type

Filter Cartridges

Filter Media

Polypropylene

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR530M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 10 inches, silicone, M5 - DOE, internal 120 O-rings (retrofits 213 O-ringstyle)4

Product ID: NXT12010UM5S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT02510UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT1020USM7
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 µm

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches, silicone

Product ID: NXA340UM8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM298F050H21TIMMD
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Poly-Fine® XLD Filter Cartridges, Polypropylene, Length 10 inches, EPDM, DOE industrial

Product ID: XLD3010UE
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
End Configuration Code
Blank
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, SOE metal spring/polypropylene cap saw cut end

Product ID: NXT130USI
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: R2F700
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches

Product ID: CLR510
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
5 micron

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: R2FYM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT330UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
1,351 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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