Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Microelectronics

Filter Media

Polypropylene

NXA 40-10U-M7S product photo

Nexis, NXA, 40 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA4010UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron
NXA 1-4U-M3S product photo

Nexis, NXA, 1 μm, 10.2 cm (4 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), Silicone gasket

Product ID: NXA14UM3S
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT1010UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 29.25 inches

Product ID: NXT202925U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes
NXA 7-20U-M3E product photo

Nexis, NXA, 7 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA720UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
7 micron
NXA 0.5-10U-M7S product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA0510UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
NXT 10-40U-M8N product photo

Nexis, NXT, 10 μm, 102 cm (40 in), SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5), Nitrile gasket

Product ID: NXT1040UM8N
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
NXT 30-10U-M3E product photo

Nexis, NXT, 30 μm, 25.4 cm (10 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXT3010UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron
NXT 1-4U product photo

Nexis, NXT, 1 μm, 10.2 cm (4 in), DOE industrial (no end caps)

Product ID: NXT14U
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
NXA 0.5-10U-DOEE product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA0510UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
NXA 30-30U-DOEE product photo

Nexis, NXA, 30 μm, 76.2 cm (30 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA3030UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron
NXA 10-10U product photo

Nexis, NXA, 10 μm, 25.4 cm (10 in), DOE industrial (no end caps)

Product ID: NXA1010U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
10 micron
75 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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