Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

Product Type

Filter Cartridges

Profile Code 19 20

Product ID: AB2P01019J
Unit of Measure
1/EA
Min Order Qty
1
U050AW40A product photo

U050AW40A

Product ID: U050AW40A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
U001A9.75U-1PK product photo

U001A9.75U-1PK

Product ID: U001A975U1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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RLS1FPS200

Product ID: RLS1FPS200
Unit of Measure
1/EA
Min Order Qty
1

RM2F005H21-COA

Product ID: RM2F005H21COATIMMD
Unit of Measure
24/EA
Min Order Qty
48

Filter 10" Profile Star 1µm

Product ID: AB1A0103J
Unit of Measure
6/EA
Min Order Qty
6

RM3F050H21

Product ID: RM3F050H21TIMONIUM
Unit of Measure
48/EA
Min Order Qty
48

Y010GS10

Product ID: Y010GS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

CMC15748

Product ID: CMC15748
Unit of Measure
1/EA
Min Order Qty
1
NXA 120-10U-M7E product photo

Nexis, NXA, 120 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXA12010UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
120 micron
NXA 0.5-5U product photo

Nexis, NXA, 0.5 μm, 12.7 cm (5 in), DOE industrial (no end caps)

Product ID: NXA055U
Unit of Measure
60/EA
Min Order Qty
60
Micron
0.5 micron

Y010FS10

Product ID: Y010FS10TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
315 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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