Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

Cartridge Length (Metric)

508 mm

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 90 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer

Product ID: NXA9020UM3V
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
90 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT04520UVM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA0520U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, FEP encapsulated fluorocarbon elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: XLD320UFM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Profile® Star Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, Ethylene Propylene, double O-ring with flat end

Product ID: AB2A0303J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 3
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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NXA 0.5-20U-M3E product photo

Nexis, NXA, 0.5 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA0520UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR1020M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial

Product ID: PFT04520US
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT120UM3E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT520UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
NXA 5-20U-M3E product photo

Nexis, NXA, 5 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA520UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
NXT 150-20U product photo

Nexis, NXT, 150 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXT15020U
Unit of Measure
10/EA
Min Order Qty
10
Micron
150 micron
374 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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