Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

Gasket / O-Ring Material

Nitrile

Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT10975UN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches

Product ID: DFNT330UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3N
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXA4030UM3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Nitrile, DOE with elastomer gasket seals and end caps

Product ID: NXT1010UDOEN
Unit of Measure
30/EA
Min Order Qty
60
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial

Product ID: PFT1010UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, Nitrile

Product ID: PFT210UN
Unit of Measure
30/EA
Min Order Qty
30
Micron
2 µm
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, Nitrile (standard gaskets) , M3 product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, Nitrile (standard gaskets) , M3

Product ID: PFT0210UNM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, DOE with elastomer gasket seals & end caps

Product ID: CLR540DOEN
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
See All Attributes

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 10 inches

Product ID: CLR7510M3N
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
See All Attributes

Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN310UN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT1020UM3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
200 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English