Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

CTRG PRFL 3H C18 N200 H1 GN 20%

Product ID: ABGN3N20018H1
Unit of Measure
12/EA
Min Order Qty
12

Junior Filter HDC II 1.2µm

Product ID: MCY4463J012J
Unit of Measure
12/EA
Min Order Qty
12
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT140UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron

5ESC10770-4U200ZJ-010

Product ID: 5ESC107704U2S00001
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial

Product ID: PFT08975UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 29.25 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 29.25 Inches, Nitrile

Product ID: PFT082925UNB
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Polypropylene, with Extended Core, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Polypropylene, with Extended Core, Bulk packaging

Product ID: U010AW30UEC1U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes

5ESC10770-3U010Z-140

Product ID: 5ESC107703U010Z140
Unit of Measure
1/EA
Min Order Qty
1
Profile® Nylon, Filter Cartridges, Nylon, Length 10 Inches product photo

Profile® Nylon, Filter Cartridges, Nylon, Length 10 Inches

Product ID: RGN1FN150
Unit of Measure
12/EA
Min Order Qty
12

Junior Filter Ultipor GF+ 2µm

Product ID: MCY4463U2-20ZH4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

U003AW29.5A product photo

U003AW29.5A

Product ID: U003AW295A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT130UE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
Blank - DOE with elastomer gasket seals & end caps
Change Out Differential Pressure
2.4 bard
See All Attributes
3,691 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English